Comment drytek2 SNF 2009-11-10 15:02:55: Update unstable plasma

eenriquez at eenriquez at
Tue Nov 10 15:02:55 PST 2009

Poly etch recipe still not very stable.  Cleaned up some loose teflon insulator from the aluminum rf conductor behind the bottom electrode.
Descum recipe seems to run OK.  Need further troubleshooting.  Might need to rebuild the electrode assembly and/or replace the coil.

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