Comment drytek2 SNF 2009-11-10 15:02:55: Update unstable plasma

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Nov 10 15:02:55 PST 2009


Poly etch recipe still not very stable.  Cleaned up some loose teflon insulator from the aluminum rf conductor behind the bottom electrode.
Descum recipe seems to run OK.  Need further troubleshooting.  Might need to rebuild the electrode assembly and/or replace the coil.




More information about the drytek2-pcs mailing list