Problem drytek2 SNF 2009-11-12 17:17:38: Cannot sustain plasma

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun Nov 15 20:22:04 PST 2009


Cleaned adjustable inductor, it was hard at first tuning with
freon/sf6 gas at 150m/t pressure (o2 plasma has no problem
tuning). I ran polyetch recipe 3x for 10mins and was able to tuned
wtih reflective power as low as 10watts.




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