Problem drytek2 SNF 2009-11-16 11:11:57: NO F22 FLOW!!!!

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon Nov 16 11:11:57 PST 2009


The whitey valve is on and the dip switches are in the on position, but there is no, zip, zilch nada flow and the plasma is deep blue (SF6 only)
process 2 poly etch.




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