Comment drytek2 SNF 2009-11-16 11:20:24: cap and coil settings for O2 and poly

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon Nov 16 11:20:26 PST 2009


I have found the plasma to be tuned and stable at these settings:
O2 descum  coil 282  cap 558  process 1
poly etch       coil 282  cap 612  process 2
coil may need slight adjustment during start of run for O2 descum.




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