From latta at snf.stanford.edu Thu Oct 1 10:09:07 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Oct 2009 10:09:07 -0700 Subject: Comment drytek2 SNF 2009-09-16 22:37:29: Third plate from top Message-ID: Ha! Electrodes balanced and now it is the fastest etching electrode. From latta at snf.stanford.edu Thu Oct 1 10:09:33 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Oct 2009 10:09:33 -0700 Subject: Comment drytek2 SNF 2009-09-16 22:36:33: Normal etch rate Message-ID: Yea! From latta at snf.stanford.edu Thu Oct 1 10:10:08 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Oct 2009 10:10:08 -0700 Subject: Comment drytek2 SNF 2009-09-16 14:45:23: Staff Qual? Message-ID: Qual completed and result on wiki at; https://spf.stanford.edu/SNF/equipment/dry-etching/drytek2-model-100-drytek2-semiclean/drytek2#section-19 From latta at snf.stanford.edu Thu Oct 1 10:10:48 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Oct 2009 10:10:48 -0700 Subject: Problem drytek2 SNF 2009-08-12 13:12:45: third platen from top still has slower etch rate Message-ID: electrodes balanced- results on wiki under recent results. From shott at snf.stanford.edu Fri Oct 2 16:48:26 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:48:26 -0700 Subject: Problem drytek2 SNF 2009-07-11 12:11:01: O2 descdum reverse power drift pgm 1 Message-ID: I beleive that this problem has been largely resolved by Elmer''s "tensioner" on the roller inductor. John From shott at snf.stanford.edu Fri Oct 2 16:49:18 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:49:18 -0700 Subject: Comment drytek2 SNF 2009-07-30 14:46:08: Update pressure problem Message-ID: Resolved with replacement 1Torr manometer and proper zeroing of the readout unit by shorting. John From shott at snf.stanford.edu Fri Oct 2 16:49:34 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:49:34 -0700 Subject: Comment drytek2 SNF 2009-09-16 22:37:00: Base press reads 0.4mT Message-ID: Resolved with replacement 1Torr manometer and proper zeroing of the readout unit by shorting. John From shott at snf.stanford.edu Fri Oct 2 16:49:53 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:49:53 -0700 Subject: Comment drytek2 SNF 2009-08-18 15:29:31: Descum works fine. Message-ID: To archive ... From shott at snf.stanford.edu Fri Oct 2 16:50:10 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:50:10 -0700 Subject: Comment drytek2 SNF 2009-08-28 11:20:19: Machine cleared following shutdown ... Message-ID: To archive ... From shott at snf.stanford.edu Fri Oct 2 16:50:27 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:50:27 -0700 Subject: Comment drytek2 SNF 2009-09-04 15:40:16: still takes a while to pump down sometimes Message-ID: Resolved with replacement 1Torr manometer and proper zeroing of the readout unit by shorting. John From shott at snf.stanford.edu Fri Oct 2 16:50:47 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:50:47 -0700 Subject: Comment drytek2 SNF 2009-09-12 14:00:58: Comparison of 1Torr and 10 Torr heads .... Message-ID: To archive ... From shott at snf.stanford.edu Fri Oct 2 16:51:37 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:51:37 -0700 Subject: Problem drytek2 SNF 2009-06-24 11:21:35: 3rd platen from top slower poly etch rate. Message-ID: Better electrode balancing ... See Plone Content Management System for details. John From shott at snf.stanford.edu Fri Oct 2 16:52:00 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:52:00 -0700 Subject: Problem drytek2 SNF 2009-06-26 22:26:15: Third platen down has slower etch rate Message-ID: Improved matching ... see Plone CMS for details. John From shott at snf.stanford.edu Fri Oct 2 16:52:26 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:52:26 -0700 Subject: Comment drytek2 SNF 2008-08-12 13:40:03: Six electrode qual complete Message-ID: To the archive .... From shott at snf.stanford.edu Fri Oct 2 16:52:46 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:52:46 -0700 Subject: Comment drytek2 SNF 2008-09-23 16:53:47: ASML target program Message-ID: To the archive .... From shott at snf.stanford.edu Fri Oct 2 16:52:54 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:52:54 -0700 Subject: Comment drytek2 SNF 2009-01-09 11:06:13: Process Qual after RF repair Message-ID: To the archive .... From shott at snf.stanford.edu Fri Oct 2 16:53:00 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:53:00 -0700 Subject: Comment drytek2 SNF 2009-03-23 20:46:43: working well Message-ID: To the archive .... From shott at snf.stanford.edu Fri Oct 2 16:53:07 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:53:07 -0700 Subject: Comment drytek2 SNF 2009-04-05 00:23:37: Nitride etch Message-ID: To the archive .... From shott at snf.stanford.edu Fri Oct 2 16:53:17 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:53:17 -0700 Subject: Comment drytek2 SNF 2009-05-16 16:46:29: O2 decum prgm 1 tuning way off Message-ID: To the archive .... From shott at snf.stanford.edu Fri Oct 2 16:53:30 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:53:30 -0700 Subject: Comment drytek2 SNF 2009-05-18 11:08:20: Drytek2 OK for process 3 Message-ID: To the archive .... From shott at snf.stanford.edu Fri Oct 2 16:53:44 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:53:44 -0700 Subject: Comment drytek2 SNF 2009-06-19 11:25:24: Update rf tuning Message-ID: To the archive .... From shott at snf.stanford.edu Fri Oct 2 16:54:12 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:54:12 -0700 Subject: Comment drytek2 SNF 2009-06-21 20:12:54: Some trays' plasma look brighter than others Message-ID: Improved electrode matching. John From lindaw at snf.stanford.edu Sat Oct 10 15:45:31 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 10 Oct 2009 15:45:31 -0700 Subject: Comment drytek2 SNF 2009-10-10 15:45:30: pgm 1 & 2 were way out of tune Message-ID: found program ! and 2 totally out of tune. I can't imagine what the last user was doing. From gth at snf.stanford.edu Thu Oct 15 20:49:29 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 15 Oct 2009 20:49:29 -0700 Subject: Problem drytek2 SNF 2009-10-15 20:49:28: unable to tune reflected power Message-ID: reflected power in descum recipe does not go below 13 From cbaxter at snf.stanford.edu Thu Oct 15 21:18:50 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 15 Oct 2009 21:18:50 -0700 Subject: Problem drytek2 SNF 2009-10-15 20:49:28: unable to tune reflected power Message-ID: No problrm utning to zero reflective with sf6/o2 gas . From cbaxter at snf.stanford.edu Sun Oct 18 22:02:27 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 18 Oct 2009 22:02:27 -0700 Subject: Comment drytek2 SNF 2009-10-18 22:02:27: Standby Purge Message-ID: Found standby purge set at over 1torr, lower purge back to 240mt.