Problem drytek2 SNF 2009-07-11 12:11:01: O2 descdum reverse power drift pgm 1

shott at snf.stanford.edu shott at snf.stanford.edu
Fri Oct 2 16:48:26 PDT 2009

Previous message: Problem drytek2 SNF 2009-08-12 13:12:45: third platen from top still has slower etch rate
Next message: Comment drytek2 SNF 2009-07-30 14:46:08: Update pressure problem
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

I beleive that this problem has been largely resolved by Elmer''s "tensioner" on the roller inductor.
John

Previous message: Problem drytek2 SNF 2009-08-12 13:12:45: third platen from top still has slower etch rate
Next message: Comment drytek2 SNF 2009-07-30 14:46:08: Update pressure problem
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the drytek2-pcs mailing list