Comment drytek2 SNF 2009-09-12 14:00:58: Comparison of 1Torr and 10 Torr heads ....
shott at snf.stanford.edu
shott at snf.stanford.edu
Fri Oct 2 16:50:47 PDT 2009
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Comment drytek2 SNF 2009-09-04 15:40:16: still takes a while to pump down sometimes
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Problem drytek2 SNF 2009-06-24 11:21:35: 3rd platen from top slower poly etch rate.
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Comment drytek2 SNF 2009-09-04 15:40:16: still takes a while to pump down sometimes
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Problem drytek2 SNF 2009-06-24 11:21:35: 3rd platen from top slower poly etch rate.
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