October 2009 Archives by subject

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Starting: Thu Oct 1 10:09:07 PDT 2009
Ending: Sun Oct 18 22:02:27 PDT 2009
Messages: 26

• Comment drytek2 SNF 2008-08-12 13:40:03: Six electrode qual complete   shott at snf.stanford.edu
• Comment drytek2 SNF 2008-09-23 16:53:47: ASML target program   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-01-09 11:06:13: Process Qual after RF repair   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-03-23 20:46:43: working well   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-04-05 00:23:37: Nitride etch   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-05-16 16:46:29: O2 decum prgm 1 tuning way off   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-05-18 11:08:20: Drytek2 OK for process 3   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-06-19 11:25:24: Update rf tuning   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-06-21 20:12:54: Some trays' plasma look brighter than others   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-07-30 14:46:08: Update pressure problem   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-08-18 15:29:31: Descum works fine.   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-08-28 11:20:19: Machine cleared following shutdown ...   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-09-04 15:40:16: still takes a while to pump down sometimes   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-09-12 14:00:58: Comparison of 1Torr and 10 Torr heads ....   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-09-16 14:45:23: Staff Qual?   latta at snf.stanford.edu
• Comment drytek2 SNF 2009-09-16 22:36:33: Normal etch rate   latta at snf.stanford.edu
• Comment drytek2 SNF 2009-09-16 22:37:00: Base press reads 0.4mT   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-09-16 22:37:29: Third plate from top   latta at snf.stanford.edu
• Comment drytek2 SNF 2009-10-10 15:45:30: pgm 1 & 2 were way out of tune   lindaw at snf.stanford.edu
• Comment drytek2 SNF 2009-10-18 22:02:27: Standby Purge   cbaxter at snf.stanford.edu
• Problem drytek2 SNF 2009-06-24 11:21:35: 3rd platen from top slower poly etch rate.   shott at snf.stanford.edu
• Problem drytek2 SNF 2009-06-26 22:26:15: Third platen down has slower etch rate   shott at snf.stanford.edu
• Problem drytek2 SNF 2009-07-11 12:11:01: O2 descdum reverse power drift pgm 1   shott at snf.stanford.edu
• Problem drytek2 SNF 2009-08-12 13:12:45: third platen from top still has slower etch rate   latta at snf.stanford.edu
• Problem drytek2 SNF 2009-10-15 20:49:28: unable to tune reflected power   gth at snf.stanford.edu
• Problem drytek2 SNF 2009-10-15 20:49:28: unable to tune reflected power   cbaxter at snf.stanford.edu

Last message date: Sun Oct 18 22:02:27 PDT 2009
Archived on: Fri Jan 11 13:05:13 PST 2013

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