From fanpy at snf.stanford.edu Fri Sep 4 12:57:25 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Fri, 4 Sep 2009 12:57:25 -0700 Subject: Problem drytek2 SNF 2009-09-04 12:57:24: longer time before gas flows Message-ID: Process 2, it takes a much longer time (2-3 minutes) between pump down and the gas starting to flow. But finished process anyway. From yeh at snf.stanford.edu Fri Sep 4 15:40:17 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 4 Sep 2009 15:40:17 -0700 Subject: Comment drytek2 SNF 2009-09-04 15:40:16: still takes a while to pump down sometimes Message-ID: took 5 tries for 2 loads of wafer to start. when it didn't start it was because chamber won't pump down to low enough pressure to start flow. descum, 1min. From jrjain at snf.stanford.edu Mon Sep 7 09:02:54 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Mon, 7 Sep 2009 09:02:54 -0700 Subject: Problem drytek2 SNF 2009-09-07 09:02:54: Pressure Message-ID: No pressure reading. Tool fails to start plasma due to pressure problem. Usual fixes aren't working. From jrjain at snf.stanford.edu Mon Sep 7 16:02:02 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Mon, 7 Sep 2009 16:02:02 -0700 Subject: Shutdown drytek2 SNF 2009-09-07 16:02:02: See previous problem report regarding pressure Message-ID: From eenriquez at snf.stanford.edu Tue Sep 8 15:17:27 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Sep 2009 15:17:27 -0700 Subject: Comment drytek2 SNF 2009-09-08 15:17:27: Update Message-ID: Vacuum pump is not pumping. Need to replace the pump From cbaxter at snf.stanford.edu Tue Sep 8 23:12:40 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 8 Sep 2009 23:12:40 -0700 Subject: Comment drytek2 SNF 2009-09-08 23:12:40: Update Message-ID: The bad edward 80 pump is removed, still need to install new pump. From eenriquez at snf.stanford.edu Wed Sep 9 19:09:53 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Sep 2009 19:09:53 -0700 Subject: Comment drytek2 SNF 2009-09-09 19:09:51: Update Message-ID: Replaced the defective vacuum pump now system is able to pump down. During testing, found the pressure readout to be un-responsive. Will order a new 1 Torr manometer tomorrow. Will update on the ETA. From eenriquez at snf.stanford.edu Thu Sep 10 14:46:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Sep 2009 14:46:44 -0700 Subject: Comment drytek2 SNF 2009-09-10 14:46:43: Update Message-ID: New Manometer should be here by 5 pm today. From shott at snf.stanford.edu Thu Sep 10 17:52:36 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 10 Sep 2009 17:52:36 -0700 Subject: Comment drytek2 SNF 2009-09-10 17:52:35: Update ... still manometer problems ... Message-ID: The new manometer arrived (a 1 Torr MKS 627) with a special DB15 to 9-pin adapter to make it, electrically, connect to the Drytek 9-pin cable. When it powers up it only reads"+" and never reads a real signal. I believe that this manometer head must be working .... it was calibrated at Laminar today. That would seem to mean only two things: 1. The PDR-C-1B power supply display unit is not functional. 2. The Nupro valve is not opening and the mamometer is not seeing vacuum. A couple of things to test .... 1. Bring in a different PDR-C-1B (like the blue/green one that we used last night with the 10 Torr head). 2. Plug in a TC gauge as well, to confirm that the NUPRO valve is opening properly. System left under vacuum but with PDR-C-1B powered off. John From eenriquez at snf.stanford.edu Fri Sep 11 15:42:10 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Sep 2009 15:42:10 -0700 Subject: Comment drytek2 SNF 2009-09-11 15:42:09: Update Message-ID: The new manometer adapter cable was mis-wired. Corrected the wiring. Now system pumps down to less than 20 mT but the pump is unable to handle a gas load. When I ran the O2 plasma recipe, the system pressure could only go down to around 360 mT (setpoint = 150 mT). Need to check the roots blower pump From shott at snf.stanford.edu Fri Sep 11 20:38:06 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Sep 2009 20:38:06 -0700 Subject: Comment drytek2 SNF 2009-09-11 20:38:05: EH500 blower ... no joy! Message-ID: I tried to see if replacing the oil in both the EH500 blower helped with pump speed. The oil in the coupling reservoir looked pretty nasty ... and I've left it in a nalgene container if anyone wants to look at it. However, fresh oil did not seem to increase ability to handle gas load. With no load, pumps to base quite nicely. However, can't seem to control to 150 mtorr with an oxygen flow of more than about 25 sccm. As soon as you hit about 30 sccm of flow the throttle valve is 100% open and pressure rises. Pressure is about 300 mtorr by the time flow reaches 100 sccm. This would seem to argue that the blower should be replaced. If Cesar is in this evening or over the weekend, I'm hopeful that he can install a new blower. Thanks, John From shott at snf.stanford.edu Fri Sep 11 23:06:44 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Sep 2009 23:06:44 -0700 Subject: Shutdown drytek2 SNF 2009-09-07 16:02:02: See previous problem report regarding pressure Message-ID: We have replaced the pump and the capacitance manometer. The manometer is a newer MKS Model 627 1 Torr head rather than the older Model 227 that was in service previously. We have a custom wiring harness to adapte the existing controller to the new head. This head should produce 0-10 output for a pressure of 0-1 torr. In other words, 150 mTorr should produce 1.5 V output. For a time, we though that we had a blower problem becauase the "normal" nitrogen flow conditions was reading (it appeared) about a 10X higher pressure than normal .... that is 3400 rather than 340 mTorr. However, a 1 Torr head CAN'T read 3400 mTorr (because that would be an output of 34 V which can't happen for a head supplied by +/- 15 V. As a result, I believe that this was actually reading 340.0 Torr and we had failed to set the decimal point. Also, because this is a 1 Torr head (Drytek1 uses a 10 Torr head), we need the inputy voltage on teh Type 252A pressure controller to be set to 10V input rather than 1 V input. We will confirm these things on Monday with test wafers and with more careful pressure and voltage measurements. Please process with caution until that determination has been made. Thanks, John From shott at snf.stanford.edu Fri Sep 11 23:07:31 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Sep 2009 23:07:31 -0700 Subject: Comment drytek2 SNF 2009-09-08 15:17:27: Update Message-ID: We have replaced the pump and the capacitance manometer. The manometer is a newer MKS Model 627 1 Torr head rather than the older Model 227 that was in service previously. We have a custom wiring harness to adapte the existing controller to the new head. This head should produce 0-10 output for a pressure of 0-1 torr. In other words, 150 mTorr should produce 1.5 V output. For a time, we though that we had a blower problem becauase the "normal" nitrogen flow conditions was reading (it appeared) about a 10X higher pressure than normal .... that is 3400 rather than 340 mTorr. However, a 1 Torr head CAN'T read 3400 mTorr (because that would be an output of 34 V which can't happen for a head supplied by +/- 15 V. As a result, I believe that this was actually reading 340.0 Torr and we had failed to set the decimal point. Also, because this is a 1 Torr head (Drytek1 uses a 10 Torr head), we need the inputy voltage on teh Type 252A pressure controller to be set to 10V input rather than 1 V input. We will confirm these things on Monday with test wafers and with more careful pressure and voltage measurements. Please process with caution until that determination has been made. Thanks, John From shott at snf.stanford.edu Fri Sep 11 23:07:46 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Sep 2009 23:07:46 -0700 Subject: Comment drytek2 SNF 2009-09-08 23:12:40: Update Message-ID: We have replaced the pump and the capacitance manometer. The manometer is a newer MKS Model 627 1 Torr head rather than the older Model 227 that was in service previously. We have a custom wiring harness to adapte the existing controller to the new head. This head should produce 0-10 output for a pressure of 0-1 torr. In other words, 150 mTorr should produce 1.5 V output. For a time, we though that we had a blower problem becauase the "normal" nitrogen flow conditions was reading (it appeared) about a 10X higher pressure than normal .... that is 3400 rather than 340 mTorr. However, a 1 Torr head CAN'T read 3400 mTorr (because that would be an output of 34 V which can't happen for a head supplied by +/- 15 V. As a result, I believe that this was actually reading 340.0 Torr and we had failed to set the decimal point. Also, because this is a 1 Torr head (Drytek1 uses a 10 Torr head), we need the inputy voltage on teh Type 252A pressure controller to be set to 10V input rather than 1 V input. We will confirm these things on Monday with test wafers and with more careful pressure and voltage measurements. Please process with caution until that determination has been made. Thanks, John From shott at snf.stanford.edu Fri Sep 11 23:08:05 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Sep 2009 23:08:05 -0700 Subject: Comment drytek2 SNF 2009-09-09 19:09:51: Update Message-ID: We have replaced the pump and the capacitance manometer. The manometer is a newer MKS Model 627 1 Torr head rather than the older Model 227 that was in service previously. We have a custom wiring harness to adapte the existing controller to the new head. This head should produce 0-10 output for a pressure of 0-1 torr. In other words, 150 mTorr should produce 1.5 V output. For a time, we though that we had a blower problem becauase the "normal" nitrogen flow conditions was reading (it appeared) about a 10X higher pressure than normal .... that is 3400 rather than 340 mTorr. However, a 1 Torr head CAN'T read 3400 mTorr (because that would be an output of 34 V which can't happen for a head supplied by +/- 15 V. As a result, I believe that this was actually reading 340.0 Torr and we had failed to set the decimal point. Also, because this is a 1 Torr head (Drytek1 uses a 10 Torr head), we need the inputy voltage on teh Type 252A pressure controller to be set to 10V input rather than 1 V input. We will confirm these things on Monday with test wafers and with more careful pressure and voltage measurements. Please process with caution until that determination has been made. Thanks, John From shott at snf.stanford.edu Fri Sep 11 23:08:16 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Sep 2009 23:08:16 -0700 Subject: Comment drytek2 SNF 2009-09-10 14:46:43: Update Message-ID: We have replaced the pump and the capacitance manometer. The manometer is a newer MKS Model 627 1 Torr head rather than the older Model 227 that was in service previously. We have a custom wiring harness to adapte the existing controller to the new head. This head should produce 0-10 output for a pressure of 0-1 torr. In other words, 150 mTorr should produce 1.5 V output. For a time, we though that we had a blower problem becauase the "normal" nitrogen flow conditions was reading (it appeared) about a 10X higher pressure than normal .... that is 3400 rather than 340 mTorr. However, a 1 Torr head CAN'T read 3400 mTorr (because that would be an output of 34 V which can't happen for a head supplied by +/- 15 V. As a result, I believe that this was actually reading 340.0 Torr and we had failed to set the decimal point. Also, because this is a 1 Torr head (Drytek1 uses a 10 Torr head), we need the inputy voltage on teh Type 252A pressure controller to be set to 10V input rather than 1 V input. We will confirm these things on Monday with test wafers and with more careful pressure and voltage measurements. Please process with caution until that determination has been made. Thanks, John From shott at snf.stanford.edu Fri Sep 11 23:08:32 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Sep 2009 23:08:32 -0700 Subject: Comment drytek2 SNF 2009-09-10 17:52:35: Update ... still manometer problems ... Message-ID: We have replaced the pump and the capacitance manometer. The manometer is a newer MKS Model 627 1 Torr head rather than the older Model 227 that was in service previously. We have a custom wiring harness to adapte the existing controller to the new head. This head should produce 0-10 output for a pressure of 0-1 torr. In other words, 150 mTorr should produce 1.5 V output. For a time, we though that we had a blower problem becauase the "normal" nitrogen flow conditions was reading (it appeared) about a 10X higher pressure than normal .... that is 3400 rather than 340 mTorr. However, a 1 Torr head CAN'T read 3400 mTorr (because that would be an output of 34 V which can't happen for a head supplied by +/- 15 V. As a result, I believe that this was actually reading 340.0 Torr and we had failed to set the decimal point. Also, because this is a 1 Torr head (Drytek1 uses a 10 Torr head), we need the inputy voltage on teh Type 252A pressure controller to be set to 10V input rather than 1 V input. We will confirm these things on Monday with test wafers and with more careful pressure and voltage measurements. Please process with caution until that determination has been made. Thanks, John From shott at snf.stanford.edu Fri Sep 11 23:08:58 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Sep 2009 23:08:58 -0700 Subject: Comment drytek2 SNF 2009-09-11 15:42:09: Update Message-ID: We have replaced the pump and the capacitance manometer. The manometer is a newer MKS Model 627 1 Torr head rather than the older Model 227 that was in service previously. We have a custom wiring harness to adapte the existing controller to the new head. This head should produce 0-10 output for a pressure of 0-1 torr. In other words, 150 mTorr should produce 1.5 V output. For a time, we though that we had a blower problem becauase the "normal" nitrogen flow conditions was reading (it appeared) about a 10X higher pressure than normal .... that is 3400 rather than 340 mTorr. However, a 1 Torr head CAN'T read 3400 mTorr (because that would be an output of 34 V which can't happen for a head supplied by +/- 15 V. As a result, I believe that this was actually reading 340.0 Torr and we had failed to set the decimal point. Also, because this is a 1 Torr head (Drytek1 uses a 10 Torr head), we need the inputy voltage on teh Type 252A pressure controller to be set to 10V input rather than 1 V input. We will confirm these things on Monday with test wafers and with more careful pressure and voltage measurements. Please process with caution until that determination has been made. Thanks, John From shott at snf.stanford.edu Fri Sep 11 23:09:10 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Sep 2009 23:09:10 -0700 Subject: Comment drytek2 SNF 2009-09-11 20:38:05: EH500 blower ... no joy! Message-ID: We have replaced the pump and the capacitance manometer. The manometer is a newer MKS Model 627 1 Torr head rather than the older Model 227 that was in service previously. We have a custom wiring harness to adapte the existing controller to the new head. This head should produce 0-10 output for a pressure of 0-1 torr. In other words, 150 mTorr should produce 1.5 V output. For a time, we though that we had a blower problem becauase the "normal" nitrogen flow conditions was reading (it appeared) about a 10X higher pressure than normal .... that is 3400 rather than 340 mTorr. However, a 1 Torr head CAN'T read 3400 mTorr (because that would be an output of 34 V which can't happen for a head supplied by +/- 15 V. As a result, I believe that this was actually reading 340.0 Torr and we had failed to set the decimal point. Also, because this is a 1 Torr head (Drytek1 uses a 10 Torr head), we need the inputy voltage on teh Type 252A pressure controller to be set to 10V input rather than 1 V input. We will confirm these things on Monday with test wafers and with more careful pressure and voltage measurements. Please process with caution until that determination has been made. Thanks, John From shott at snf.stanford.edu Fri Sep 11 23:09:29 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Sep 2009 23:09:29 -0700 Subject: Problem drytek2 SNF 2009-09-07 09:02:54: Pressure Message-ID: We have replaced the pump and the capacitance manometer. The manometer is a newer MKS Model 627 1 Torr head rather than the older Model 227 that was in service previously. We have a custom wiring harness to adapte the existing controller to the new head. This head should produce 0-10 output for a pressure of 0-1 torr. In other words, 150 mTorr should produce 1.5 V output. For a time, we though that we had a blower problem becauase the "normal" nitrogen flow conditions was reading (it appeared) about a 10X higher pressure than normal .... that is 3400 rather than 340 mTorr. However, a 1 Torr head CAN'T read 3400 mTorr (because that would be an output of 34 V which can't happen for a head supplied by +/- 15 V. As a result, I believe that this was actually reading 340.0 Torr and we had failed to set the decimal point. Also, because this is a 1 Torr head (Drytek1 uses a 10 Torr head), we need the inputy voltage on teh Type 252A pressure controller to be set to 10V input rather than 1 V input. We will confirm these things on Monday with test wafers and with more careful pressure and voltage measurements. Please process with caution until that determination has been made. Thanks, John From shott at snf.stanford.edu Sat Sep 12 14:00:59 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 12 Sep 2009 14:00:59 -0700 Subject: Comment drytek2 SNF 2009-09-12 14:00:58: Comparison of 1Torr and 10 Torr heads .... Message-ID: This morning I conducted a more thorough examination of the new 1 Toor MKS manometer head. To do so, I found another 10 Torr head with a KF flange and a separate PDR (power/display/relay) unit. I had them both connected to drytek2 at the same time. I then compared them at full pumpdown, the 150 mTorr pressure normally used during oxygen descum and at the 300+ mTorr setting when in standby mode. For the new 1 Torr head I measured: 0 mTorr base pressure: 0 volts 150 mTorr readout: 1.60 volts 305 mTorr readout: 3.16 volts Under the same conditions, the 10 Torr external head read: 0 mTorr base pressure: 0 volts 142 mTorr readout: 0.141 volts 288 mTorr readout: 0.287 volts So, I am pretty convinced that we are now controlling to a pressure of preetty close to 150 mTorr with the controller setting on the 10 V scale. I'm also convinced that at one point .... I don't know when .... that we did have a 10 Torr head, rather than a 1 Torr head, on drytek2. Finally, we may need to adjust the PDR relay outputs .... I think that they are currently set for a 10 Torr head with low and high relay switching occurring at about 23 mTorr and 2070 mTorr, respectively. With the existing 1 Torr head, those values become 2.3 mTorr and 207 mTorr .... and should likely be bumped up by a factor of 10, if possible. I'm not going to do that, however, until others have a chance to read and comment on this entire line of thinking. Thanks, John From jtsai at snf.stanford.edu Mon Sep 14 11:20:25 2009 From: jtsai at snf.stanford.edu (jtsai at snf.stanford.edu) Date: Mon, 14 Sep 2009 11:20:25 -0700 Subject: Problem drytek2 SNF 2009-09-14 11:20:24: RF power E06 Message-ID: Can't run the process. Power display showed E06 and the process was shutdown by itself From king at snf.stanford.edu Tue Sep 15 20:00:03 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 15 Sep 2009 20:00:03 -0700 Subject: Problem drytek2 SNF 2009-09-15 20:00:03: Drytek2 pressure Message-ID: won't pump (or display) below about 426mT. I've tried varying the MKS input V between the three modes (10V, 1FV and 0.1V) and have tried all three process positions. The pump valve seems to be all the way open. It's set to External, Remote, and toggled to Open. Need the big guns to help me out. Thanks. From king at snf.stanford.edu Tue Sep 15 22:08:34 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 15 Sep 2009 22:08:34 -0700 Subject: Shutdown drytek2 SNF 2009-09-15 22:08:33: Pump problems Message-ID: When you close the valve there's not a high leak rate indicated so the problem is probably somewhere down the line toward the pump. Or the manometer is reading wrong. Either way, it won't work. Thanks for your help. From cbaxter at snf.stanford.edu Tue Sep 15 22:25:53 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 Sep 2009 22:25:53 -0700 Subject: Comment drytek2 SNF 2009-09-15 22:25:53: Booster pump Message-ID: The blower pump is bad, need to be change, main pump is ok. From eenriquez at snf.stanford.edu Wed Sep 16 14:35:26 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Sep 2009 14:35:26 -0700 Subject: Problem drytek2 SNF 2009-09-15 20:00:03: Drytek2 pressure Message-ID: The big guns replaced the roots blower. Set the pressure controller input to 10 V. Ran an O2 plasma for 15 min at 150.2 mT. Set the process start pressure to 19.9 mT. From eenriquez at snf.stanford.edu Wed Sep 16 14:35:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Sep 2009 14:35:34 -0700 Subject: Shutdown drytek2 SNF 2009-09-15 22:08:33: Pump problems Message-ID: The big guns replaced the roots blower. Set the pressure controller input to 10 V. Ran an O2 plasma for 15 min at 150.2 mT. Set the process start pressure to 19.9 mT. From eenriquez at snf.stanford.edu Wed Sep 16 14:35:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Sep 2009 14:35:47 -0700 Subject: Comment drytek2 SNF 2009-09-15 22:25:53: Booster pump Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 16 14:36:03 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Sep 2009 14:36:03 -0700 Subject: Problem drytek2 SNF 2009-09-14 11:20:24: RF power E06 Message-ID: Unable to duplicate From eenriquez at snf.stanford.edu Wed Sep 16 14:40:41 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Sep 2009 14:40:41 -0700 Subject: Problem drytek2 SNF 2009-09-16 14:40:40: Needs a process qual Message-ID: Several major components have been replaced. Roots blower, vacuum pump and manometer. Please verify your process before committing your devices. From king at snf.stanford.edu Wed Sep 16 14:45:24 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 16 Sep 2009 14:45:24 -0700 Subject: Comment drytek2 SNF 2009-09-16 14:45:23: Staff Qual? Message-ID: Can you please run a standard qualification and let us know it basically works? Thanks. From king at snf.stanford.edu Wed Sep 16 22:36:34 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 16 Sep 2009 22:36:34 -0700 Subject: Comment drytek2 SNF 2009-09-16 22:36:33: Normal etch rate Message-ID: Our wafers etched correctly for the Process #2 poly etch program (SF6= 117 sccm; F22= 51). From king at snf.stanford.edu Wed Sep 16 22:37:01 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 16 Sep 2009 22:37:01 -0700 Subject: Comment drytek2 SNF 2009-09-16 22:37:00: Base press reads 0.4mT Message-ID: From king at snf.stanford.edu Wed Sep 16 22:37:30 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 16 Sep 2009 22:37:30 -0700 Subject: Comment drytek2 SNF 2009-09-16 22:37:29: Third plate from top Message-ID: still seems to have a slower etch rate. From latta at snf.stanford.edu Fri Sep 18 13:35:10 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 18 Sep 2009 13:35:10 -0700 Subject: Problem drytek2 SNF 2009-09-16 14:40:40: Needs a process qual Message-ID: Qual done and posted on wiki. From latta at snf.stanford.edu Fri Sep 18 13:35:29 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 18 Sep 2009 13:35:29 -0700 Subject: Problem drytek2 SNF 2009-09-04 12:57:24: longer time before gas flows Message-ID: fixed