Comment drytek2 SNF 2009-09-04 15:40:16: still takes a while to pump down sometimes

yeh at snf.stanford.edu yeh at snf.stanford.edu
Fri Sep 4 15:40:17 PDT 2009


took 5 tries for 2 loads of wafer to start.   when it didn't start it was because chamber won't pump down to low enough pressure to start flow. 
descum, 1min.  




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