Comment drytek2 SNF 2009-09-11 15:42:09: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Sep 11 15:42:10 PDT 2009


The new manometer adapter cable was mis-wired.  Corrected the wiring.  Now system pumps down to less than 20 mT but the pump is unable to handle a gas load.  When I ran the O2 plasma recipe, the system pressure could only go down to around 360 mT (setpoint = 150 mT).   
Need to check the roots blower pump




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