Problem drytek2 SNF 2009-09-15 20:00:03: Drytek2 pressure

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 16 14:35:26 PDT 2009


The big guns replaced the roots blower.  Set the pressure controller input to 10 V.  Ran an O2 plasma for 15 min at  150.2 mT.  Set the process start pressure to 19.9 mT.




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