Shutdown drytek2 SNF 2009-09-15 22:08:33: Pump problems

[eenriquez at snf.stanford.edu]

The big guns replaced the roots blower.  Set the pressure controller input to 10 V.  Ran an O2 plasma for 15 min at  150.2 mT.  Set the process start pressure to 19.9 mT.