From cbaxter at snf.stanford.edu Mon Aug 2 08:50:40 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 2 Aug 2010 08:50:40 -0700 Subject: Problem drytek2 SNF 2010-07-29 11:45:43: 4th platen from top missing pin in front Message-ID: Installed new teflon pin. From lindaw at snf.stanford.edu Mon Aug 2 10:09:46 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 2 Aug 2010 10:09:46 -0700 Subject: Problem drytek2 SNF 2010-08-02 10:09:46: replaced pin fell out Message-ID: The front pin on the 4th platen from the top that was replaced was not tight in the hole. It flew out when my wafer touched it and is now somewhere on the floor of the chamber, possibly near the front door, but I can't see it. From cbaxter at snf.stanford.edu Mon Aug 2 11:23:50 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 2 Aug 2010 11:23:50 -0700 Subject: Problem drytek2 SNF 2010-08-02 10:09:46: replaced pin fell out Message-ID: Installed new pin.. From eenriquez at snf.stanford.edu Tue Aug 3 13:14:53 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Aug 2010 13:14:53 -0700 Subject: Comment drytek2 SNF 2010-07-30 10:22:14: Update platen pin Message-ID: Archived From eenriquez at snf.stanford.edu Tue Aug 3 13:15:01 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Aug 2010 13:15:01 -0700 Subject: Comment drytek2 SNF 2010-07-29 11:36:58: Tested OK after power outtage Message-ID: Archived From latta at snf.stanford.edu Wed Aug 4 11:54:55 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 4 Aug 2010 11:54:55 -0700 Subject: Comment drytek2 SNF 2010-08-04 11:54:55: Poly etch rate Message-ID: After a labmember commented on the etch rate for the poly recipe I ran a wafer on electrode #1 for 2 mins after 10 mins of seasoning. Flows for SF6 and F22 were steady, 401W, ref = 006W. Etch rate = 2197A/mins This is higher than the last time the rates were looked at; Jan 2010, 1730A/min. From eenriquez at snf.stanford.edu Tue Aug 10 09:14:20 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Aug 2010 09:14:20 -0700 Subject: Comment drytek2 SNF 2010-08-10 09:14:19: Monthly PM completed Message-ID: From latta at snf.stanford.edu Thu Aug 19 14:51:13 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Aug 2010 14:51:13 -0700 Subject: Comment drytek2 SNF 2010-08-19 14:51:12: Poly etch rate- another check Message-ID: We ran two wafers using the Poly Recipe. Each was for 2 mins on the second electrode. Results; Patterned wafer = 1977 A/min Blank wafer = 1980 A/min From zeyuan at snf.stanford.edu Thu Aug 26 01:26:35 2010 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Thu, 26 Aug 2010 01:26:35 -0700 Subject: Comment drytek2 SNF 2010-08-26 01:26:34: RF power unstable process 3 Message-ID: RF power unstable for process 3, made some adjustment but can't work. Work out well without wafer but can't work with wafer From eenriquez at snf.stanford.edu Thu Aug 26 09:46:49 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Aug 2010 09:46:49 -0700 Subject: Comment drytek2 SNF 2010-08-26 01:26:34: RF power unstable process 3 Message-ID: No problem found.. Ran for 16 min with a wafer on electrode #2. From lindaw at snf.stanford.edu Mon Aug 30 15:09:01 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 30 Aug 2010 15:09:01 -0700 Subject: Problem drytek2 SNF 2010-08-30 15:09:00: process 1 coil doesn't seem to have any tuning effect Message-ID: The previous users told me they couldn't tune the O2 descum. I checked the program settings, and noticed the cap and coil were way off from my recorded settings from last week. I set them back to coil 160 and cap 525. the reflected was still high, and turning the coil did not seem to have any effect. I adjusted the cap to 465 and the reflected power went down to 12, and 500W forward. the coil still has no effect on the tuning, even when turned 000 to ~400 (traditional setting range). I think something might be up with process 1 coil. Process 2 poly ran fine, but it was already tuned, so I didn't try changing the coil for process 2. From eenriquez at snf.stanford.edu Mon Aug 30 15:13:29 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Aug 2010 15:13:29 -0700 Subject: Shutdown drytek2 SNF 2010-08-30 15:13:28: Update coil problem Message-ID: The coil motor is not turning on. Power to the controller is OK. Drive belt is also OK. Possibly a bad motor. Need to troubleshoot further. From eenriquez at snf.stanford.edu Tue Aug 31 09:31:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Aug 2010 09:31:30 -0700 Subject: Shutdown drytek2 SNF 2010-08-30 15:13:28: Update coil problem Message-ID: Reseated the coil drive relays. Ran process for 25 min with no problems. Detuned and retuned the matching network several times during the process. From eenriquez at snf.stanford.edu Tue Aug 31 09:31:35 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Aug 2010 09:31:35 -0700 Subject: Problem drytek2 SNF 2010-08-30 15:09:00: process 1 coil doesn't seem to have any tuning effect Message-ID: Reseated the coil drive relays. Ran process for 25 min with no problems. Detuned and retuned the matching network several times during the process.