Problem drytek2 SNF 2010-08-02 10:09:46: replaced pin fell out

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon Aug 2 10:09:46 PDT 2010


The front pin on the 4th platen from the top that was replaced was not tight in the hole.  It flew out when my wafer touched it and is now somewhere on the floor of the chamber, possibly near the front door, but I can't see it.




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