Comment drytek2 SNF 2010-08-19 14:51:12: Poly etch rate- another check

latta at latta at
Thu Aug 19 14:51:13 PDT 2010

We ran two wafers using the Poly Recipe.  Each was for 2 mins on the second electrode.  Results;
Patterned wafer = 1977 A/min
Blank  wafer = 1980 A/min

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