Comment drytek2 SNF 2010-08-19 14:51:12: Poly etch rate- another check

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Aug 19 14:51:13 PDT 2010


We ran two wafers using the Poly Recipe.  Each was for 2 mins on the second electrode.  Results;
Patterned wafer = 1977 A/min
Blank  wafer = 1980 A/min




More information about the drytek2-pcs mailing list