Comment drytek2 SNF 2010-08-26 01:26:34: RF power unstable process 3

zeyuan at snf.stanford.edu zeyuan at snf.stanford.edu
Thu Aug 26 01:26:35 PDT 2010


RF power unstable for process 3, made some adjustment but can't work. Work out well without wafer but can't work with wafer




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