Comment drytek2 SNF 2010-08-26 01:26:34: RF power unstable process 3

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Aug 26 09:46:49 PDT 2010


No problem found.. Ran for 16 min with a wafer on electrode #2. 




More information about the drytek2-pcs mailing list