From eenriquez at snf.stanford.edu Mon Jan 4 14:55:17 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Jan 2010 14:55:17 -0800 Subject: Problem drytek2 SNF 2010-01-04 14:55:16: RF tuning problem Message-ID: Minimum reflected power was ~ 29 W. From fnf1pal at snf.stanford.edu Thu Jan 7 12:12:04 2010 From: fnf1pal at snf.stanford.edu (fnf1pal at snf.stanford.edu) Date: Thu, 7 Jan 2010 12:12:04 -0800 Subject: Problem drytek2 SNF 2010-01-07 12:12:04: SF6 Reading is constantly 0 Message-ID: I turned on the gases SF6 and Freon for polysilicon etching. Although the LED says SF6 is on I read off 0 gas flow. I also tried to tune the gas flow but nothing happens. From eenriquez at snf.stanford.edu Thu Jan 7 13:36:43 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 7 Jan 2010 13:36:43 -0800 Subject: Problem drytek2 SNF 2010-01-07 12:12:04: SF6 Reading is constantly 0 Message-ID: Opened the SF6 shut-off valve (round valve). Ran recipe 2 with no problems. From khskoo at snf.stanford.edu Fri Jan 8 21:54:22 2010 From: khskoo at snf.stanford.edu (khskoo at snf.stanford.edu) Date: Fri, 8 Jan 2010 21:54:22 -0800 Subject: Problem drytek2 SNF 2010-01-08 21:54:22: no power control Message-ID: For process 3, reflected power is too high and never goes down below 40. From eenriquez at snf.stanford.edu Mon Jan 11 14:01:29 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Jan 2010 14:01:29 -0800 Subject: Comment drytek2 SNF 2010-01-11 14:01:29: Update tuning problem Message-ID: Asked Jim Mcvitte for help in troubleshooting the problem. From mcvittie at snf.stanford.edu Mon Jan 11 18:27:26 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Mon, 11 Jan 2010 18:27:26 -0800 Subject: Problem drytek2 SNF 2010-01-04 14:55:16: RF tuning problem Message-ID: I could not find a significant problem. Here is what I found. Jim Drytek-2 ~500 W 150mT Gas Power Tuning 100 CF4 527/005 168/510 100CF4/10O2 527/000 153/510 100 O2 526/005 149/605 100 SF6 528/013 180/047 100 SF6 527/011 184/000 100 SF6 527/011 176/045 100SF6/68F22 520/003 132/146 100SF6/50F22 507/003 163/046 From emyers at snf.stanford.edu Tue Jan 12 09:15:10 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 12 Jan 2010 09:15:10 -0800 Subject: Comment drytek2 SNF 2010-01-12 09:15:10: Tuning Parameters,per Jim McVittie Message-ID: I could not find a significant problem. Here is what I found. Jim Drytek-2 ~500 W 150mT Gas Power Tuning 100 CF4 527/005 168/510 100CF4/10O2 527/000 153/510 100 O2 526/005 149/605 100 SF6 528/013 180/047 100 SF6 527/011 184/000 100 SF6 527/011 176/045 100SF6/68F22 520/003 132/146 100SF6/50F22 507/003 163/046 All tuning was done on channel 1. Tuning points are top/bottom cap's. From latta at snf.stanford.edu Thu Jan 14 13:45:55 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Jan 2010 13:45:55 -0800 Subject: Comment drytek2 SNF 2010-01-14 13:45:54: Quals after annual shutdown Message-ID: can be located on the wiki at https://snf.stanford.edu/SNF/equipment/dry-etching/drytek2-model-100-drytek2-semiclean/new-recent-process-qualifications From latta at snf.stanford.edu Thu Jan 14 13:46:27 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Jan 2010 13:46:27 -0800 Subject: Comment drytek2 SNF 2009-11-06 09:39:38: Completed Monthly PM Message-ID: archived From latta at snf.stanford.edu Thu Jan 14 13:46:41 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Jan 2010 13:46:41 -0800 Subject: Comment drytek2 SNF 2009-11-11 14:52:58: 30 sec O2 Message-ID: ok From latta at snf.stanford.edu Thu Jan 14 13:47:16 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Jan 2010 13:47:16 -0800 Subject: Comment drytek2 SNF 2009-11-11 16:28:07: O2 recipes ok Message-ID: archived From latta at snf.stanford.edu Thu Jan 14 13:47:29 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Jan 2010 13:47:29 -0800 Subject: Comment drytek2 SNF 2009-11-14 11:28:34: plasma seems fine Message-ID: thanks From latta at snf.stanford.edu Thu Jan 14 13:48:52 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Jan 2010 13:48:52 -0800 Subject: Problem drytek2 SNF 2010-01-08 21:54:22: no power control Message-ID: ok now From latta at snf.stanford.edu Thu Jan 14 13:49:38 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Jan 2010 13:49:38 -0800 Subject: Comment drytek2 SNF 2010-01-11 14:01:29: Update tuning problem Message-ID: done and posted as resolved From lindaw at snf.stanford.edu Fri Jan 29 11:47:53 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 29 Jan 2010 11:47:53 -0800 Subject: Problem drytek2 SNF 2010-01-29 11:47:53: process pressure slow to reach set point Message-ID: Running process 2 poly etch, process pressure didn't reach set point until ~1 minute into etch. From latta at snf.stanford.edu Fri Jan 29 12:26:47 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 29 Jan 2010 12:26:47 -0800 Subject: Comment drytek2 SNF 2010-01-29 12:26:46: Process pressure jumpy Message-ID: I noticed the same thing as Lindaw while using the poly and descum processes yesterday. From eenriquez at snf.stanford.edu Fri Jan 29 14:00:22 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Jan 2010 14:00:22 -0800 Subject: Problem drytek2 SNF 2010-01-29 11:47:53: process pressure slow to reach set point Message-ID: Adjusted the gain on the pressure controller from 20 to 75. From eenriquez at snf.stanford.edu Fri Jan 29 14:00:29 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Jan 2010 14:00:29 -0800 Subject: Comment drytek2 SNF 2010-01-29 12:26:46: Process pressure jumpy Message-ID: Archived