Problem drytek2 SNF 2010-01-07 12:12:04: SF6 Reading is constantly 0

fnf1pal at snf.stanford.edu fnf1pal at snf.stanford.edu
Thu Jan 7 12:12:04 PST 2010


I turned on the gases SF6 and Freon for polysilicon etching. Although the LED says SF6 is on I read off 0 gas flow. I also tried to tune the gas flow but nothing happens.




More information about the drytek2-pcs mailing list