Problem drytek2 SNF 2010-01-04 14:55:16: RF tuning problem

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Mon Jan 11 18:27:26 PST 2010


I could not find a significant problem. Here is what I found.  Jim 
Drytek-2   ~500 W  150mT
Gas                            Power                 Tuning
100 CF4                    527/005              168/510
100CF4/10O2          527/000              153/510
100 O2                      526/005              149/605 
100 SF6                    528/013              180/047
100 SF6                    527/011              184/000
100 SF6                    527/011              176/045 
100SF6/68F22        520/003              132/146
100SF6/50F22        507/003              163/046 




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