Problem drytek2 SNF 2010-01-29 11:47:53: process pressure slow to reach set point

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Fri Jan 29 11:47:53 PST 2010

Previous message: Comment drytek2 SNF 2009-11-14 11:28:34: plasma seems fine
Next message: Problem drytek2 SNF 2010-01-29 11:47:53: process pressure slow to reach set point
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Running process 2 poly etch, process pressure didn't reach set point until ~1 minute into etch.

Previous message: Comment drytek2 SNF 2009-11-14 11:28:34: plasma seems fine
Next message: Problem drytek2 SNF 2010-01-29 11:47:53: process pressure slow to reach set point
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the drytek2-pcs mailing list