Problem drytek2 SNF 2010-01-29 11:47:53: process pressure slow to reach set point

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Fri Jan 29 11:47:53 PST 2010


Running process 2 poly etch, process pressure didn't reach set point until ~1 minute into etch.




More information about the drytek2-pcs mailing list