From pcristman at snf.stanford.edu Mon Jun 14 21:48:26 2010 From: pcristman at snf.stanford.edu (pcristman at snf.stanford.edu) Date: Mon, 14 Jun 2010 21:48:26 -0700 Subject: Problem drytek2 SNF 2010-06-14 21:48:26: RF Power not stable? Message-ID: During a 2 minute descum at about 30 seconds in the reverse power dropped as low as 3 W then stedily ross to almost 20 W reverse power. The problem was repeatable. I did not adjust the tuning network at all during the etch. From cbaxter at snf.stanford.edu Thu Jun 17 10:36:38 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 17 Jun 2010 10:36:38 -0700 Subject: Problem drytek2 SNF 2010-06-14 21:48:26: RF Power not stable? Message-ID: From lindaw at snf.stanford.edu Mon Jun 28 17:19:56 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 28 Jun 2010 17:19:56 -0700 Subject: Problem drytek2 SNF 2010-06-28 17:19:55: 4th platen from top missing front pin Message-ID: