Problem drytek2 SNF 2010-06-14 21:48:26: RF Power not stable?

pcristman at snf.stanford.edu pcristman at snf.stanford.edu
Mon Jun 14 21:48:26 PDT 2010


During a 2 minute descum at about 30 seconds in the reverse power dropped as low as 3 W then stedily ross to almost 20 W reverse power. The problem was repeatable.  I did not adjust the tuning network at all during the etch.




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