Problem drytek2 SNF 2010-05-01 10:17:56: no SF6 or F22 gas flow

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sat May 1 10:17:56 PDT 2010


The whitey valves are open, and I checked that the round valves below them are open, but there is no gas flow for SF6 or F22.  O2 flow is ok.




More information about the drytek2-pcs mailing list