Comment drytek2 SNF 2010-11-30 15:22:39: <solved> low etch rate in SOI

karthikv at snf.stanford.edu karthikv at snf.stanford.edu
Tue Nov 30 15:22:40 PST 2010


After talking to other people, it seems like the low etch rate problem might have been because of my soi wafers. I had done an anneal in nitrigen ambient 1040AN in tylan2 and it is possible that a thin layer of nitride may have formed on the surface which causes a slow etch rate initially. Once that layer is removed the etch proceeds with the normal expected etch rate. 




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