From eenriquez at snf.stanford.edu Fri Apr 8 09:12:23 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Apr 2011 09:12:23 -0700 Subject: Comment drytek2 SNF 2011-03-21 10:33:44: Pumped out O2 line Message-ID: Archived From eenriquez at snf.stanford.edu Fri Apr 8 09:12:33 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Apr 2011 09:12:33 -0700 Subject: Comment drytek2 SNF 2011-02-10 09:18:37: Completed monthly pm Message-ID: Archived From cktee at snf.stanford.edu Wed Apr 13 12:51:24 2011 From: cktee at snf.stanford.edu (cktee at snf.stanford.edu) Date: Wed, 13 Apr 2011 12:51:24 -0700 Subject: Problem drytek2 SNF 2011-04-13 12:51:22: Unable to enable after accidental shutdown Message-ID: Cannot turn on machine after accidentally switching off circuit breaker switch instead of RF switch below. Cannot enable it as well. From eenriquez at snf.stanford.edu Wed Apr 13 14:33:04 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Apr 2011 14:33:04 -0700 Subject: Problem drytek2 SNF 2011-04-13 12:51:22: Unable to enable after accidental shutdown Message-ID: Restarted system and ran O2 plasma. From jasonlin at snf.stanford.edu Sat Apr 16 15:27:31 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sat, 16 Apr 2011 15:27:31 -0700 Subject: Shutdown drytek2 SNF 2011-04-16 15:27:31: No gases flowing Message-ID: Tried process 1 initially (O2 plasma) but no O2 flow. After a few minutes, the "forward" power LED on the machine displays E15. No flow, pressure is low (~20mT), and no plasma. Tried to troubleshoot by running process 2 and 3, but no flow on any of these. From cbaxter at snf.stanford.edu Sun Apr 17 03:56:45 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 17 Apr 2011 03:56:45 -0700 Subject: Shutdown drytek2 SNF 2011-04-16 15:27:31: No gases flowing Message-ID: Ran process recipe#1 using o2 gas for 30mins and could not duplicate the same gas flow fault. The plasma is stable at 500watts with less than 10watts reflective. From lindaw at snf.stanford.edu Tue Apr 19 11:56:38 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 19 Apr 2011 11:56:38 -0700 Subject: Comment drytek2 SNF 2011-04-19 11:56:38: slow to pump down Message-ID: drytek 2 is slow to pump down and new base pressure seems to be low 30 something mT, rather than the nomal below 19 mT that is used to have to reach to start the gas flow. Pump problem? From eenriquez at snf.stanford.edu Wed Apr 20 09:17:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Apr 2011 09:17:12 -0700 Subject: Shutdown drytek2 SNF 2011-04-20 09:17:11: Not pumping down Message-ID: Only pumps down to ~45 mT. From cbaxter at snf.stanford.edu Wed Apr 20 12:52:44 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 20 Apr 2011 12:52:44 -0700 Subject: Comment drytek2 SNF 2011-04-20 12:52:44: Vacuum leak Message-ID: The chsmber main isolation valve is leaking to atm, I removed the valve and will try to rebuild it.. From eenriquez at snf.stanford.edu Wed Apr 20 18:27:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Apr 2011 18:27:47 -0700 Subject: Comment drytek2 SNF 2011-04-20 18:27:47: Update vacuum leak Message-ID: Cleaned gate valve o-ring. Now base pressure is about 15 mT. Everything is working except the system won't vent. From cbaxter at snf.stanford.edu Thu Apr 21 08:24:21 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 21 Apr 2011 08:24:21 -0700 Subject: Shutdown drytek2 SNF 2011-04-20 09:17:11: Not pumping down Message-ID: Chamber is venting now, plugged in the control cable for the valve close control.. From mdickey at snf.stanford.edu Tue Apr 26 14:12:34 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 26 Apr 2011 14:12:34 -0700 Subject: Shutdown drytek2 SNF 2011-04-26 14:12:33: power Message-ID: power is off. Trying to locate the breaker From shott at snf.stanford.edu Tue Apr 26 15:20:28 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 26 Apr 2011 15:20:28 -0700 Subject: Shutdown drytek2 SNF 2011-04-26 14:12:33: power Message-ID: Drytek2 is powered by panel R1LB which is behind the door leading from close to wbdiff to p5000etch. It is circuit breakers 31/33/35. They were on. Mail control power was off ..;. and I was able to turn it on. System power was off .... and I was able to turn it on. Pump and blower were both off and I was able to turn them both on. I don't know whether someone simply hit the wrong buttons or what .... but things came up properly and I was able to pump it down and put it into normal STANDBY mode. Strange .... John From shott at snf.stanford.edu Tue Apr 26 15:22:30 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 26 Apr 2011 15:22:30 -0700 Subject: Problem drytek2 SNF 2011-04-26 15:22:30: Watch your etches .... Message-ID: drytek2 users: We found that the system was completely powered down .... for as yet unknown reasons. It came back up quickly, but I suggest that everyone do a careful test run with the process that you intend to use before commiting real wafers to make sure that power, gas flows, matching, vacuum levels, etc are what you expect. Thanks, John From hector at snf.stanford.edu Thu Apr 28 17:26:59 2011 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Thu, 28 Apr 2011 17:26:59 -0700 Subject: Problem drytek2 SNF 2011-04-28 17:26:59: pressure problem Message-ID: system can't pump down to base pressure to start gas flow = no etching From hector at snf.stanford.edu Thu Apr 28 19:38:28 2011 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Thu, 28 Apr 2011 19:38:28 -0700 Subject: Shutdown drytek2 SNF 2011-04-28 19:38:27: cant reach base pressure Message-ID: From eenriquez at snf.stanford.edu Fri Apr 29 10:42:37 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Apr 2011 10:42:37 -0700 Subject: Shutdown drytek2 SNF 2011-04-28 19:38:27: cant reach base pressure Message-ID: Ran 30 minute O2 clean. Base pressure is 1.5mT. Process starts in about 50 sec after "Cycle start" is pressed (gas flow starts in 30 sec) From eenriquez at snf.stanford.edu Fri Apr 29 10:42:46 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Apr 2011 10:42:46 -0700 Subject: Problem drytek2 SNF 2011-04-28 17:26:59: pressure problem Message-ID: Ran 30 minute O2 clean. Base pressure is 1.5mT. Process starts in about 50 sec after "Cycle start" is pressed (gas flow starts in 30 sec) From latta at snf.stanford.edu Fri Apr 29 15:23:57 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 29 Apr 2011 15:23:57 -0700 Subject: Comment drytek2 SNF 2011-03-03 09:09:28: found system vented Message-ID: archived From latta at snf.stanford.edu Fri Apr 29 15:24:33 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 29 Apr 2011 15:24:33 -0700 Subject: Comment drytek2 SNF 2011-03-31 09:46:34: Completed monthly PM Message-ID: archived From latta at snf.stanford.edu Fri Apr 29 15:24:47 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 29 Apr 2011 15:24:47 -0700 Subject: Comment drytek2 SNF 2011-04-19 11:56:38: slow to pump down Message-ID: archived From latta at snf.stanford.edu Fri Apr 29 15:25:16 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 29 Apr 2011 15:25:16 -0700 Subject: Comment drytek2 SNF 2011-04-20 12:52:44: Vacuum leak Message-ID: archived From latta at snf.stanford.edu Fri Apr 29 15:25:35 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 29 Apr 2011 15:25:35 -0700 Subject: Comment drytek2 SNF 2011-04-20 18:27:47: Update vacuum leak Message-ID: archived From latta at snf.stanford.edu Fri Apr 29 15:26:53 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 29 Apr 2011 15:26:53 -0700 Subject: Problem drytek2 SNF 2011-04-26 15:22:30: Watch your etches .... Message-ID: system has been fine for 4 days. I am pretty sure that someone turned the power breakers off instead of the rf power.