Shutdown drytek2 SNF 2011-04-16 15:27:31: No gases flowing

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun Apr 17 03:56:45 PDT 2011


Ran process recipe#1 using o2 gas for 30mins and could not
duplicate the same gas flow fault. The plasma is stable at
500watts with less than 10watts reflective.




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