Problem drytek2 SNF 2011-04-26 15:22:30: Watch your etches ....

shott at snf.stanford.edu shott at snf.stanford.edu
Tue Apr 26 15:22:30 PDT 2011


drytek2 users:
We found that the system was completely powered down .... for as yet unknown reasons.  It came back up quickly, but I suggest that everyone do a careful test run with the process that you intend to use before commiting real wafers to make sure that power, gas flows, matching, vacuum levels, etc are what you expect.
Thanks,
John




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