Problem drytek2 SNF 2011-04-26 15:22:30: Watch your etches ....

shott at shott at
Tue Apr 26 15:22:30 PDT 2011

drytek2 users:
We found that the system was completely powered down .... for as yet unknown reasons.  It came back up quickly, but I suggest that everyone do a careful test run with the process that you intend to use before commiting real wafers to make sure that power, gas flows, matching, vacuum levels, etc are what you expect.

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