From lindaw at snf.stanford.edu Mon Aug 1 15:12:30 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 1 Aug 2011 15:12:30 -0700 Subject: Problem drytek2 SNF 2011-08-01 15:12:30: bottom slot has no plasma again Message-ID: From fpurkl at snf.stanford.edu Tue Aug 2 13:25:16 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Tue, 2 Aug 2011 13:25:16 -0700 Subject: Problem drytek2 SNF 2011-08-02 13:25:15: Plasma not stable, Pmax<330W Message-ID: Plasma flickers on and off during O2 descum recipe, the maximum power was 330W From xzhuan1 at snf.stanford.edu Fri Aug 5 10:27:17 2011 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 5 Aug 2011 10:27:17 -0700 Subject: Shutdown drytek2 SNF 2011-08-05 10:27:16: no plasma Message-ID: when I switched on the RF power, the green RF led indicator light doesn't turn on. No plasma no matter how I adjust the coil and cap. From cbaxter at snf.stanford.edu Sat Aug 6 20:33:13 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 6 Aug 2011 20:33:13 -0700 Subject: Shutdown drytek2 SNF 2011-08-05 10:27:16: no plasma Message-ID: Tuned process#1,2 and 3 to less than 10watts reflective. From cbaxter at snf.stanford.edu Sat Aug 6 20:33:58 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 6 Aug 2011 20:33:58 -0700 Subject: Problem drytek2 SNF 2011-08-02 13:25:15: Plasma not stable, Pmax<330W Message-ID: Ran 30 mins o2 plasma at 400watts w/out problem. From cbaxter at snf.stanford.edu Sat Aug 6 20:34:07 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 6 Aug 2011 20:34:07 -0700 Subject: Problem drytek2 SNF 2011-08-01 15:12:30: bottom slot has no plasma again Message-ID: From cbaxter at snf.stanford.edu Sat Aug 6 21:03:35 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 6 Aug 2011 21:03:35 -0700 Subject: Problem drytek2 SNF 2011-07-19 10:15:03: seem like it's out of order Message-ID: From cbaxter at snf.stanford.edu Sat Aug 6 21:03:52 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 6 Aug 2011 21:03:52 -0700 Subject: Problem drytek2 SNF 2011-07-18 15:33:36: descum: plasma flickers Message-ID: From cbaxter at snf.stanford.edu Sat Aug 6 21:04:04 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 6 Aug 2011 21:04:04 -0700 Subject: Problem drytek2 SNF 2011-07-28 03:51:04: plasma is not stable, and can't reach 500W Message-ID: From eenriquez at snf.stanford.edu Mon Aug 8 09:35:07 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Aug 2011 09:35:07 -0700 Subject: Shutdown drytek2 SNF 2011-08-08 09:35:06: Installing new RF generator Message-ID: From eenriquez at snf.stanford.edu Tue Aug 9 14:44:43 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Aug 2011 14:44:43 -0700 Subject: Comment drytek2 SNF 2011-08-09 14:44:42: Update RF generator Message-ID: Installed new RF generator but it is not giving any output. Still troubleshooting. From eenriquez at snf.stanford.edu Wed Aug 10 17:55:34 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Aug 2011 17:55:34 -0700 Subject: Comment drytek2 SNF 2011-08-10 17:55:34: Update RF generator Message-ID: Order another RF generator from a different company. We expedited the delivery of this generator and it should be here early next week. From cbaxter at snf.stanford.edu Wed Aug 10 21:16:32 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 10 Aug 2011 21:16:32 -0700 Subject: Shutdown drytek2 SNF 2011-08-08 09:35:06: Installing new RF generator Message-ID: Installed original oem6 generator and ran 30mins o2 plasma. Tuned to max power at 400watts and verified plasma to each electrode. Elmer is working on getting another oem6 generator. From lindaw at snf.stanford.edu Fri Aug 12 15:28:00 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 12 Aug 2011 15:28:00 -0700 Subject: Problem drytek2 SNF 2011-08-12 15:27:59: bottom slot has no plasma again Message-ID: the plasma on the bottom slot went dark in the middle of a 2 min poly etch. From lindaw at snf.stanford.edu Fri Aug 12 15:40:49 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 12 Aug 2011 15:40:49 -0700 Subject: Comment drytek2 SNF 2011-08-12 15:40:49: bottom slot has plasma prgm 1 O2 but not Message-ID: bottom slot has plasma program 1 O2 descum, but not in program 2 poly. From lindaw at snf.stanford.edu Fri Aug 12 15:45:43 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 12 Aug 2011 15:45:43 -0700 Subject: Comment drytek2 SNF 2011-08-12 15:45:43: It's a MIRACLE! Bottom slot has plasma again Message-ID: It's a Miracle, the bottom slot has plasma again during poly! Oh wait, after 1 min 9 seconds it is dark again and retune needed. Never mind. From zguo at snf.stanford.edu Sun Aug 14 14:53:24 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Sun, 14 Aug 2011 14:53:24 -0700 Subject: Problem drytek2 SNF 2011-08-14 14:53:23: Power less than 360watt Message-ID: used Poly etch recipe, RF power can hardly reach more than 360 watt. From eenriquez at snf.stanford.edu Mon Aug 15 07:59:57 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Aug 2011 07:59:57 -0700 Subject: Shutdown drytek2 SNF 2011-08-15 07:59:57: Electrode assy. rebuild Message-ID: From eenriquez at snf.stanford.edu Tue Aug 16 15:23:39 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Aug 2011 15:23:39 -0700 Subject: Comment drytek2 SNF 2011-08-16 15:23:38: Update Message-ID: Electrode rebuild is 99% complete. Just need to repair an electrode support post. The new generator is also here. We will install tomorrow morning From mdickey at snf.stanford.edu Wed Aug 17 13:04:53 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 17 Aug 2011 13:04:53 -0700 Subject: Shutdown drytek2 SNF 2011-08-15 07:59:57: Electrode assy. rebuild Message-ID: reinstalled old generator. Have reflective power now and maximum forward is at 415 watts From mtang at snf.stanford.edu Wed Aug 17 16:31:40 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 17 Aug 2011 16:31:40 -0700 Subject: Comment drytek2 SNF 2011-08-17 16:31:39: Update Message-ID: See Mike's shutdown clear. System tunes well, but max RF is still only ~400 W. More work tomorrow. From eenriquez at snf.stanford.edu Thu Aug 18 07:40:32 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Aug 2011 07:40:32 -0700 Subject: Comment drytek2 SNF 2011-08-16 15:23:38: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Aug 18 07:40:54 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Aug 2011 07:40:54 -0700 Subject: Comment drytek2 SNF 2011-08-12 15:45:43: It's a MIRACLE! Bottom slot has plasma again Message-ID: Archived From eenriquez at snf.stanford.edu Thu Aug 18 07:41:03 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Aug 2011 07:41:03 -0700 Subject: Comment drytek2 SNF 2011-06-30 10:38:09: Update RF power Message-ID: Archived From eenriquez at snf.stanford.edu Thu Aug 18 07:41:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Aug 2011 07:41:12 -0700 Subject: Comment drytek2 SNF 2011-07-06 19:09:05: Update RF generator Message-ID: Archived From eenriquez at snf.stanford.edu Thu Aug 18 07:41:19 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Aug 2011 07:41:19 -0700 Subject: Comment drytek2 SNF 2011-07-08 15:01:40: Update Drytek2 Message-ID: Archived From mcvittie at snf.stanford.edu Thu Aug 18 14:57:18 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 18 Aug 2011 14:57:18 -0700 Subject: Comment drytek2 SNF 2011-08-18 14:57:17: Drytek2 -- Bad RF Connector Message-ID: Checked out the rf generator on Drytek2. Found intermittent gnd connection on rf cable connector at supply was open. Generator has a rf power "leveling" which limits the output power to about 400W. It is likely that one or both of the output power amps are damaged. Suspect the was the source/cause of the rf generator problem was the bad rf connector which reflected all the power back into generator output stages when the gnd was open. I am looking at replacing the ENI generator with a AE supply which we have on hand. Jim From eenriquez at snf.stanford.edu Fri Aug 19 12:55:29 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Aug 2011 12:55:29 -0700 Subject: Comment drytek2 SNF 2011-07-28 14:44:53: Update RF generator Message-ID: Archived From eenriquez at snf.stanford.edu Fri Aug 19 12:55:38 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Aug 2011 12:55:38 -0700 Subject: Comment drytek2 SNF 2011-08-09 14:44:42: Update RF generator Message-ID: Archived From eenriquez at snf.stanford.edu Fri Aug 19 12:55:44 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Aug 2011 12:55:44 -0700 Subject: Comment drytek2 SNF 2011-08-10 17:55:34: Update RF generator Message-ID: Archived From eenriquez at snf.stanford.edu Fri Aug 19 12:55:56 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Aug 2011 12:55:56 -0700 Subject: Comment drytek2 SNF 2011-05-23 14:13:28: found system vented in prgm 1, main power off. Message-ID: Archived From eenriquez at snf.stanford.edu Fri Aug 19 13:01:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:01:21 -0700 Subject: Problem drytek2 SNF 2011-08-12 15:27:59: bottom slot has no plasma again Message-ID: Plasma is very stable now after the electrode rebuild. Found heavy flaky on two of the RF feedtroughs inside the chamber. Ran an oxide etch at 430 watts for 20 minutes with no problems. From eenriquez at snf.stanford.edu Fri Aug 19 13:01:34 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:01:34 -0700 Subject: Comment drytek2 SNF 2011-08-12 15:40:49: bottom slot has plasma prgm 1 O2 but not Message-ID: Plasma is very stable now after the electrode rebuild. Found heavy flaky on two of the RF feedtroughs inside the chamber. Ran an oxide etch at 430 watts for 20 minutes with no problems. From eenriquez at snf.stanford.edu Fri Aug 19 13:01:39 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:01:39 -0700 Subject: Problem drytek2 SNF 2011-08-14 14:53:23: Power less than 360watt Message-ID: Plasma is very stable now after the electrode rebuild. Found heavy flaky on two of the RF feedtroughs inside the chamber. Ran an oxide etch at 430 watts for 20 minutes with no problems. From eenriquez at snf.stanford.edu Fri Aug 19 13:01:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:01:52 -0700 Subject: Comment drytek2 SNF 2011-07-21 13:07:44: process 1 O2 descum tuning very unstable Message-ID: Plasma is very stable now after the electrode rebuild. Found heavy flaky on two of the RF feedtroughs inside the chamber. Ran an oxide etch at 430 watts for 20 minutes with no problems. From eenriquez at snf.stanford.edu Fri Aug 19 13:01:57 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:01:57 -0700 Subject: Problem drytek2 SNF 2011-07-21 13:02:53: bottom platen has no plama again Message-ID: Plasma is very stable now after the electrode rebuild. Found heavy flaky on two of the RF feedtroughs inside the chamber. Ran an oxide etch at 430 watts for 20 minutes with no problems. From eenriquez at snf.stanford.edu Fri Aug 19 13:02:13 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:02:13 -0700 Subject: Comment drytek2 SNF 2011-07-15 14:46:28: Update new RF generator Message-ID: Archived From eenriquez at snf.stanford.edu Fri Aug 19 13:02:32 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:02:32 -0700 Subject: Problem drytek2 SNF 2011-06-27 13:17:01: while running process 2 poly Message-ID: Plasma is very stable now after the electrode rebuild. Found heavy flaky on two of the RF feedtroughs inside the chamber. Ran an oxide etch at 430 watts for 20 minutes with no problems. From eenriquez at snf.stanford.edu Fri Aug 19 13:06:13 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:06:13 -0700 Subject: Comment drytek2 SNF 2011-07-19 12:35:00: Previous user could not get SF6 flow because Message-ID: Archived From mcvittie at snf.stanford.edu Fri Aug 26 13:37:59 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 26 Aug 2011 13:37:59 -0700 Subject: Shutdown drytek2 SNF 2011-08-26 13:37:59: drytek2 Message-ID: Need to replace bufferchip in rf supply interface. Should take 30 min. Jim From mcvittie at snf.stanford.edu Fri Aug 26 14:14:20 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 26 Aug 2011 14:14:20 -0700 Subject: Shutdown drytek2 SNF 2011-08-26 13:37:59: drytek2 Message-ID: Buffer chip replaced. Rf generator is working same as before this afrernoon's chip failure. jim From mcvittie at snf.stanford.edu Wed Aug 31 13:34:16 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 31 Aug 2011 13:34:16 -0700 Subject: Shutdown drytek2 SNF 2011-08-31 13:34:16: drytek2 -- need to fit cable connector Message-ID: Found broken solder joints on rf control cable. Among the broken connection was the signal going to the reflected power readout. Should be fitted within an hour. Jim From mcvittie at snf.stanford.edu Wed Aug 31 16:56:22 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 31 Aug 2011 16:56:22 -0700 Subject: Shutdown drytek2 SNF 2011-08-31 13:34:16: drytek2 -- need to fit cable connector Message-ID: Fixed 23 broken wires in D-15 connect to rf generator. Also added strain relief to the cable to prevent same problem from re-occurring. Jim