Problem drytek2 SNF 2011-08-12 15:27:59: bottom slot has no plasma again

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Fri Aug 12 15:28:00 PDT 2011

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the plasma on the bottom slot went dark in the middle of a 2 min poly etch.

Previous message: Comment drytek2 SNF 2011-08-10 17:55:34: Update RF generator
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