Problem drytek2 SNF 2011-08-14 14:53:23: Power less than 360watt

eenriquez at eenriquez at
Fri Aug 19 13:01:39 PDT 2011

Plasma is very stable now after the electrode rebuild.  Found heavy flaky on two of the RF feedtroughs inside the chamber.  Ran an oxide etch at 430 watts for 20 minutes with no problems.

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