From eenriquez at snf.stanford.edu Thu Dec 1 11:42:53 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2011 11:42:53 -0800 Subject: Problem drytek2 SNF 2011-11-30 09:34:35: Tuning did not work Message-ID: No problem found. Ran O2 plasma. Was able to tune to 0 reflected power. From fpurkl at snf.stanford.edu Thu Dec 1 17:48:15 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Thu, 1 Dec 2011 17:48:15 -0800 Subject: Problem drytek2 SNF 2011-12-01 17:48:15: Plasma weak on 2nd plate from bottom Message-ID: I ran the Poly Etch recipe with standard pressure, power and gas settings. The plasma for the 2nd plate from the bottom did not strike until I reached a RF power of 250W. For 400W the plasma color for that plate was significantly darker then for all the other ones. From lupin000 at snf.stanford.edu Sat Dec 3 21:47:46 2011 From: lupin000 at snf.stanford.edu (lupin000 at snf.stanford.edu) Date: Sat, 3 Dec 2011 21:47:46 -0800 Subject: Problem drytek2 SNF 2011-12-03 21:47:45: drytek2 is down Message-ID: I enabled drytek2 to use Isotropic Si Etch recipe for 30 seconds and first two times were good. However, when I tried to do third time of Si etch it suddenly didn't work. The machine keep venting and I cannot hear any hissing sound when I press Cycle Start button. I set the RF power level, chamber pressure, gas flow rates exactly same as the numbers in the manual but I don't know why it went down. From kokab at snf.stanford.edu Sat Dec 3 23:01:03 2011 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Sat, 3 Dec 2011 23:01:03 -0800 Subject: Shutdown drytek2 SNF 2011-12-03 23:01:03: doesn't pump down Message-ID: tried several times by previous user still doesn not seem to be working. From cbaxter at snf.stanford.edu Sun Dec 4 18:07:37 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Dec 2011 18:07:37 -0800 Subject: Shutdown drytek2 SNF 2011-12-03 23:01:03: doesn't pump down Message-ID: Lost the 24vdc to the system blown f4 fuse. Chanaged 8amp fuse and cycled tool w/out problem.. From cbaxter at snf.stanford.edu Sun Dec 4 18:50:21 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Dec 2011 18:50:21 -0800 Subject: Problem drytek2 SNF 2011-12-03 21:47:45: drytek2 is down Message-ID: Changed 24vdc fuse.. From cbaxter at snf.stanford.edu Sun Dec 4 18:50:41 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Dec 2011 18:50:41 -0800 Subject: Problem drytek2 SNF 2011-12-01 17:48:15: Plasma weak on 2nd plate from bottom Message-ID: From eenriquez at snf.stanford.edu Mon Dec 5 09:05:10 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Dec 2011 09:05:10 -0800 Subject: Comment drytek2 SNF 2011-11-29 16:16:38: white process light 3 is out Message-ID: Light has been replaced From latta at snf.stanford.edu Wed Dec 7 14:55:43 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:55:43 -0800 Subject: Problem drytek2 SNF 2011-11-20 14:05:08: missing one pin on third plate Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:55:55 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:55:55 -0800 Subject: Problem drytek2 SNF 2011-11-23 11:44:57: missing front pin on 2nd platen from the top Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:56:15 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:56:15 -0800 Subject: Comment drytek2 SNF 2011-09-28 16:47:06: New quals posted on wiki Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:56:43 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:56:43 -0800 Subject: Comment drytek2 SNF 2010-08-19 14:51:12: Poly etch rate- another check Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:56:52 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:56:52 -0800 Subject: Comment drytek2 SNF 2011-01-06 10:05:46: Jan 2011 quals posted on wiki Message-ID: archived From latta at snf.stanford.edu Wed Dec 7 14:57:02 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Dec 2011 14:57:02 -0800 Subject: Comment drytek2 SNF 2011-03-30 12:09:02: Please stop turning off the gas flow toggle switches Message-ID: archived From hector at snf.stanford.edu Thu Dec 8 04:40:22 2011 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Thu, 8 Dec 2011 04:40:22 -0800 Subject: Problem drytek2 SNF 2011-12-08 04:40:21: multiple issues Message-ID: 1) missing teflon dowel pins to hold wafers 2) some dowel pin holes are plugged 3) power fluctuated by about 15 Watts (unstable) From fpurkl at snf.stanford.edu Sat Dec 10 11:01:34 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Sat, 10 Dec 2011 11:01:34 -0800 Subject: Comment drytek2 SNF 2011-12-10 11:01:34: not pumped down Message-ID: The tool was not in standby mode and the chamber was not pumped down by the previous user. From rhenn at snf.stanford.edu Sun Dec 11 00:14:08 2011 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Sun, 11 Dec 2011 00:14:08 -0800 Subject: Problem drytek2 SNF 2011-12-11 00:14:07: O2 deviation Message-ID: O2 deviation occurred when doing descum (process 1). Worked after during microreset. From eenriquez at snf.stanford.edu Wed Dec 14 10:56:11 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Dec 2011 10:56:11 -0800 Subject: Shutdown drytek2 SNF 2011-12-14 10:56:11: Scheduled shutdown Message-ID: