Problem drytek2 SNF 2011-12-01 17:48:15: Plasma weak on 2nd plate from bottom

[fpurkl at snf.stanford.edu]

I ran the Poly Etch recipe with standard pressure, power and gas settings. The plasma for the 2nd plate from the bottom did not strike until I reached a RF power of 250W. For 400W the plasma color for that plate was significantly darker then for all the other ones.