Problem drytek2 SNF 2011-12-01 17:48:15: Plasma weak on 2nd plate from bottom

fpurkl at snf.stanford.edu fpurkl at snf.stanford.edu
Thu Dec 1 17:48:15 PST 2011


I ran the Poly Etch recipe with standard pressure, power and gas settings. The plasma for the 2nd plate from the bottom did not strike until I reached a RF power of 250W. For 400W the plasma color for that plate was significantly darker then for all the other ones.




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