From latta at snf.stanford.edu  Thu Jan  6 10:05:48 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 6 Jan 2011 10:05:48 -0800
Subject: Comment drytek2 SNF 2011-01-06 10:05:46: Jan 2011 quals posted on wiki
Message-ID: <mailman.1451.1357938294.25682.drytek2-pcs@snf.stanford.edu>

You may find the quals here;
https://snf.stanford.edu/SNF/equipment/dry-etching/drytek2-model-100-drytek2-semiclean/new-recent-process-qualifications



From latta at snf.stanford.edu  Thu Jan  6 10:06:12 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 6 Jan 2011 10:06:12 -0800
Subject: Comment drytek2 SNF 2010-11-11 11:01:50: Completed Monthly PM
Message-ID: <mailman.1452.1357938294.25682.drytek2-pcs@snf.stanford.edu>

archived



From latta at snf.stanford.edu  Thu Jan  6 10:06:30 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 6 Jan 2011 10:06:30 -0800
Subject: Comment drytek2 SNF 2010-11-26 16:58:10: machine not in correct standby state
Message-ID: <mailman.1453.1357938294.25682.drytek2-pcs@snf.stanford.edu>

archived



From latta at snf.stanford.edu  Thu Jan  6 10:06:58 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 6 Jan 2011 10:06:58 -0800
Subject: Comment drytek2 SNF 2010-11-30 15:22:39: <solved> low etch rate in SOI
Message-ID: <mailman.1454.1357938294.25682.drytek2-pcs@snf.stanford.edu>

archived



From eenriquez at snf.stanford.edu  Fri Jan 14 10:18:50 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 14 Jan 2011 10:18:50 -0800
Subject: Comment drytek2 SNF 2011-01-14 10:18:49: Completed monthly PM
Message-ID: <mailman.1455.1357938294.25682.drytek2-pcs@snf.stanford.edu>




From hrleebh at snf.stanford.edu  Thu Jan 20 00:28:39 2011
From: hrleebh at snf.stanford.edu (hrleebh at snf.stanford.edu)
Date: Thu, 20 Jan 2011 00:28:39 -0800
Subject: Problem drytek2 SNF 2011-01-20 00:28:38: RF maximun power
Message-ID: <mailman.1456.1357938294.25682.drytek2-pcs@snf.stanford.edu>

When I tried to use the process 3, the maximum power light was on.
And the reverse power is too high.



From eenriquez at snf.stanford.edu  Thu Jan 20 09:47:18 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 20 Jan 2011 09:47:18 -0800
Subject: Problem drytek2 SNF 2011-01-20 00:28:38: RF maximun power
Message-ID: <mailman.1457.1357938294.25682.drytek2-pcs@snf.stanford.edu>

No problem found.  Ran program 3 (O2) for 10 minutes.