From eenriquez at snf.stanford.edu Fri Jul 1 15:30:07 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 1 Jul 2011 15:30:07 -0700 Subject: Shutdown drytek2 SNF 2011-07-01 15:30:07: RF generator is not working Message-ID: In the process of changing the rf generator, we damaged the rf interface. Now the generator won't turn on. We need to repair the interface and also order a new rf generator. we are waiting for a quote for the generator. We will have a quote by next Tuesday. From eenriquez at snf.stanford.edu Wed Jul 6 19:09:05 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Jul 2011 19:09:05 -0700 Subject: Comment drytek2 SNF 2011-07-06 19:09:05: Update RF generator Message-ID: Ordered parts to repair the RF power readout. Received the quote for a new generator. The lead time is 3 weeks. Will try to locate another vendor. I will order a new generator by Friday. From eenriquez at snf.stanford.edu Fri Jul 8 15:01:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Jul 2011 15:01:41 -0700 Subject: Comment drytek2 SNF 2011-07-08 15:01:40: Update Drytek2 Message-ID: Got the RF generator partially working (the display is on) but it has a logic problem because it indicates that the RF is on when it isn't. The part to repair this should be here on Monday. At that point, the system should be operational but with a reduced maximum power of about 400 W. I will hold off on ordering a new generator until Monday. I found another vendor who said that he can have one ready in less than 1 week. However, I have not received a quote from him. From eenriquez at snf.stanford.edu Mon Jul 11 10:05:30 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Jul 2011 10:05:30 -0700 Subject: Shutdown drytek2 SNF 2011-07-01 15:30:07: RF generator is not working Message-ID: Repaired the RF interface control box. Now able to run the RF but at a ruduced maximum power output. The RF output is unstable and drops off over time. The power drops off more quickly when the "Maximum Power" indicator is lit. The power seems to be more stable at around 350 Watts. I will be ordering a new generator today. Please monitor your etches. From lindaw at snf.stanford.edu Mon Jul 11 15:45:18 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 11 Jul 2011 15:45:18 -0700 Subject: Problem drytek2 SNF 2011-07-11 15:45:18: bottom platen has no plasma again Message-ID: The bottom platen has no plasma. It did have plasma for the first two of 3 runs of poly etch 2 min each. From cbaxter at snf.stanford.edu Thu Jul 14 09:21:27 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 14 Jul 2011 09:21:27 -0700 Subject: Problem drytek2 SNF 2011-07-11 15:45:18: bottom platen has no plasma again Message-ID: I ran process#1 at max power(400watts) and tuned it to <10watts relective power for 20 mins and checked its electrodes for plasma and monitored, plasma is present to all eletrodes for 20mins.. From lindaw at snf.stanford.edu Fri Jul 15 11:06:55 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 15 Jul 2011 11:06:55 -0700 Subject: Problem drytek2 SNF 2011-07-15 11:06:54: bottom platen has no plasma again Message-ID: ran a seasoning run no problem. ran wafers, and bottom platen was dark and the tuning had gone way out. process 2 poly. From latta at snf.stanford.edu Fri Jul 15 12:09:58 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 Jul 2011 12:09:58 -0700 Subject: Problem drytek2 SNF 2011-07-15 12:09:57: O2 Plasma program can't get more than... Message-ID: ..96W. Doesn't strick. Also user reports that reflected pwr not showing (or shows 000W And the bottom electrode does not strike- I used Poly Progam during training after O2 descum progam didn't work. No reflected shown during the poly program. From eenriquez at snf.stanford.edu Fri Jul 15 14:37:11 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Jul 2011 14:37:11 -0700 Subject: Problem drytek2 SNF 2011-07-15 12:09:57: O2 Plasma program can't get more than... Message-ID: The digital readout that indicates reflected power is not working. Please use the Bird watt meter located below the chamber to read the reflected power. The generator will put out about 400 W and light up all the electrodes when properly tuned. From eenriquez at snf.stanford.edu Fri Jul 15 14:37:17 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Jul 2011 14:37:17 -0700 Subject: Problem drytek2 SNF 2011-07-15 11:06:54: bottom platen has no plasma again Message-ID: The digital readout that indicates reflected power is not working. Please use the Bird watt meter located below the chamber to read the reflected power. The generator will put out about 400 W and light up all the electrodes when properly tuned. From eenriquez at snf.stanford.edu Fri Jul 15 14:46:29 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Jul 2011 14:46:29 -0700 Subject: Comment drytek2 SNF 2011-07-15 14:46:28: Update new RF generator Message-ID: I have ordered a new (refurbished) RF generator with a lead time of less than 1 week however, the order has been delayed since the vendor was a new vendor and they needed Stanford's credit information. I have provided the vendor with info I receive from purchasing. I will ask Marie to follow up since I will be on vacation. From emyers at snf.stanford.edu Mon Jul 18 13:38:55 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 18 Jul 2011 13:38:55 -0700 Subject: Problem drytek2 SNF 2011-06-27 13:45:36: bottom platen has no plasma Message-ID: From fpurkl at snf.stanford.edu Mon Jul 18 15:33:37 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Mon, 18 Jul 2011 15:33:37 -0700 Subject: Problem drytek2 SNF 2011-07-18 15:33:36: descum: plasma flickers Message-ID: Running Program #1 descum, the reverse power is impossible to tune down and the plasma flickers on and off (without changing the cap and coil). From ysohn at snf.stanford.edu Tue Jul 19 10:15:04 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Tue, 19 Jul 2011 10:15:04 -0700 Subject: Problem drytek2 SNF 2011-07-19 10:15:03: seem like it's out of order Message-ID: I ran process 2 and found that - pressure was fixed at around 33 and couldn't be controlled - SF6 did not flow in at all From lindaw at snf.stanford.edu Tue Jul 19 12:35:00 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 19 Jul 2011 12:35:00 -0700 Subject: Comment drytek2 SNF 2011-07-19 12:35:00: Previous user could not get SF6 flow because Message-ID: It appears that the previous user could not get SF6 flow because all of the toggle switches on the front panel were turned to off. I flipped them back up to the "ON" positions. From fc3 at snf.stanford.edu Wed Jul 20 00:59:42 2011 From: fc3 at snf.stanford.edu (fc3 at snf.stanford.edu) Date: Wed, 20 Jul 2011 00:59:42 -0700 Subject: Shutdown drytek2 SNF 2011-07-20 00:59:41: breaker Message-ID: accidentally pushed main circuit breaker during shutdown when trying to turn off rf power. also was not able to get rf power greater than 334W. From mdickey at snf.stanford.edu Wed Jul 20 07:40:09 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 20 Jul 2011 07:40:09 -0700 Subject: Shutdown drytek2 SNF 2011-07-20 00:59:41: breaker Message-ID: Restarted the machine From eenriquez at snf.stanford.edu Wed Jul 20 19:16:54 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Jul 2011 19:16:54 -0700 Subject: Shutdown drytek2 SNF 2011-07-20 19:16:54: RF generator problem Message-ID: Installed new RF generator but the control I/O is different and will not work with our setup. Need to re-install the old generator. We might need to send our generator for repair. From cbaxter at snf.stanford.edu Thu Jul 21 09:59:09 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 21 Jul 2011 09:59:09 -0700 Subject: Shutdown drytek2 SNF 2011-07-20 19:16:54: RF generator problem Message-ID: Mike installed the original rf generator. We ran 30 mins o2 plasma and tuned to max power(400watts). From xzhuan1 at snf.stanford.edu Thu Jul 21 10:27:32 2011 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 21 Jul 2011 10:27:32 -0700 Subject: Shutdown drytek2 SNF 2011-07-21 10:27:31: no plasma Message-ID: I ran a couple of O2 plasma cleaning cycles without a problem right after Ceaser put back the old generator. But on my last batch of wafers the plasma just won't come on. From cbaxter at snf.stanford.edu Thu Jul 21 12:14:41 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 21 Jul 2011 12:14:41 -0700 Subject: Shutdown drytek2 SNF 2011-07-21 10:27:31: no plasma Message-ID: Retuned match to process 1,2 and 3 using o2 gas. From lindaw at snf.stanford.edu Thu Jul 21 13:02:54 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 21 Jul 2011 13:02:54 -0700 Subject: Problem drytek2 SNF 2011-07-21 13:02:53: bottom platen has no plama again Message-ID: The bottom slot has gone dark again. From lindaw at snf.stanford.edu Thu Jul 21 13:07:45 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 21 Jul 2011 13:07:45 -0700 Subject: Comment drytek2 SNF 2011-07-21 13:07:44: process 1 O2 descum tuning very unstable Message-ID: From lindaw at snf.stanford.edu Thu Jul 21 13:28:39 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 21 Jul 2011 13:28:39 -0700 Subject: Problem drytek2 SNF 2011-07-21 13:28:38: etch rate very nonuniform across wafers and Message-ID: Etch rate very non-uniform across the wafers and from slot to slot. Also tuning to maximize forward, minimize reflected, when set, will run normally, but then the plasma goes out, and retuning is required to spark the plasma again usually multiple turns of the coil from where it once was stable to where it resparks. Then the next run will require retuning to the original settings to get plasma to spark. From eenriquez at snf.stanford.edu Mon Jul 25 15:01:43 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 25 Jul 2011 15:01:43 -0700 Subject: Shutdown drytek2 SNF 2011-07-25 15:01:42: Repairing electrode Message-ID: Repairing electrode wiring and the gas distribution rod. From eenriquez at snf.stanford.edu Tue Jul 26 09:53:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Jul 2011 09:53:14 -0700 Subject: Shutdown drytek2 SNF 2011-07-25 15:01:42: Repairing electrode Message-ID: Replaced mixing gas distribution tube. repaired a broken RF conductor. From cursive at snf.stanford.edu Thu Jul 28 03:51:04 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 28 Jul 2011 03:51:04 -0700 Subject: Problem drytek2 SNF 2011-07-28 03:51:04: plasma is not stable, and can't reach 500W Message-ID: From eenriquez at snf.stanford.edu Thu Jul 28 14:44:53 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 28 Jul 2011 14:44:53 -0700 Subject: Comment drytek2 SNF 2011-07-28 14:44:53: Update RF generator Message-ID: New RF generator should be here by Monday 6/1