Problem drytek2 SNF 2011-07-11 15:45:18: bottom platen has no plasma again

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon Jul 11 15:45:18 PDT 2011


The bottom platen has no plasma.  It did have plasma for the first two of 3 runs of poly etch 2 min each.




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