Problem drytek2 SNF 2011-07-11 15:45:18: bottom platen has no plasma again

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Jul 14 09:21:27 PDT 2011


I ran process#1 at max power(400watts) and tuned it to
<10watts relective power for 20 mins and checked its
electrodes for plasma and monitored, plasma is present
to all eletrodes for 20mins..




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