Problem drytek2 SNF 2011-07-15 11:06:54: bottom platen has no plasma again

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Fri Jul 15 11:06:55 PDT 2011


ran a seasoning run no problem. ran wafers, and bottom platen was dark and the tuning had gone way out.  process 2 poly.




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