Problem drytek2 SNF 2011-07-15 11:06:54: bottom platen has no plasma again
lindaw at snf.stanford.edu
lindaw at snf.stanford.edu
Fri Jul 15 11:06:55 PDT 2011
ran a seasoning run no problem. ran wafers, and bottom platen was dark and the tuning had gone way out. process 2 poly.
More information about the drytek2-pcs
mailing list