Problem drytek2 SNF 2011-07-15 12:09:57: O2 Plasma program can't get more than...

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Jul 15 12:09:58 PDT 2011


..96W.  Doesn't strick.
Also user reports that reflected pwr not showing (or shows 000W
And the bottom electrode does not strike- I used Poly Progam during training after O2 descum progam didn't work.  No reflected shown during the poly program.




More information about the drytek2-pcs mailing list