Problem drytek2 SNF 2011-07-19 10:15:03: seem like it's out of order

ysohn at snf.stanford.edu ysohn at snf.stanford.edu
Tue Jul 19 10:15:04 PDT 2011


I ran process 2 and found that
- pressure was fixed at around 33 and couldn't be controlled
- SF6 did not flow in at all




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