Shutdown drytek2 SNF 2011-07-21 10:27:31: no plasma

xzhuan1 at snf.stanford.edu xzhuan1 at snf.stanford.edu
Thu Jul 21 10:27:32 PDT 2011


I ran a couple of O2 plasma cleaning cycles without a problem right after Ceaser put back the old generator. But on my last batch of wafers the plasma just won't come on. 




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