Comment drytek2 SNF 2011-07-21 13:07:44: process 1 O2 descum tuning very unstable
lindaw at snf.stanford.edu
lindaw at snf.stanford.edu
Thu Jul 21 13:07:45 PDT 2011
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Problem drytek2 SNF 2011-07-21 13:02:53: bottom platen has no plama again
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Problem drytek2 SNF 2011-07-21 13:28:38: etch rate very nonuniform across wafers and
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Problem drytek2 SNF 2011-07-21 13:02:53: bottom platen has no plama again
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Problem drytek2 SNF 2011-07-21 13:28:38: etch rate very nonuniform across wafers and
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