Shutdown drytek2 SNF 2011-07-25 15:01:42: Repairing electrode

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jul 25 15:01:43 PDT 2011

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Repairing electrode wiring and the gas distribution rod.

Previous message: Problem drytek2 SNF 2011-07-21 13:28:38: etch rate very nonuniform across wafers and
Next message: Shutdown drytek2 SNF 2011-07-25 15:01:42: Repairing electrode
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