July 2011 Archives by author

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Starting: Fri Jul 1 15:30:07 PDT 2011
Ending: Thu Jul 28 14:44:53 PDT 2011
Messages: 28

• Problem drytek2 SNF 2011-07-11 15:45:18: bottom platen has no plasma again   cbaxter at snf.stanford.edu
• Shutdown drytek2 SNF 2011-07-20 19:16:54: RF generator problem   cbaxter at snf.stanford.edu
• Shutdown drytek2 SNF 2011-07-21 10:27:31: no plasma   cbaxter at snf.stanford.edu
• Problem drytek2 SNF 2011-07-28 03:51:04: plasma is not stable, and can't reach 500W   cursive at snf.stanford.edu
• Shutdown drytek2 SNF 2011-07-01 15:30:07: RF generator is not working   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2011-07-06 19:09:05: Update RF generator   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2011-07-08 15:01:40: Update Drytek2   eenriquez at snf.stanford.edu
• Shutdown drytek2 SNF 2011-07-01 15:30:07: RF generator is not working   eenriquez at snf.stanford.edu
• Problem drytek2 SNF 2011-07-15 12:09:57: O2 Plasma program can't get more than...   eenriquez at snf.stanford.edu
• Problem drytek2 SNF 2011-07-15 11:06:54: bottom platen has no plasma again   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2011-07-15 14:46:28: Update new RF generator   eenriquez at snf.stanford.edu
• Shutdown drytek2 SNF 2011-07-20 19:16:54: RF generator problem   eenriquez at snf.stanford.edu
• Shutdown drytek2 SNF 2011-07-25 15:01:42: Repairing electrode   eenriquez at snf.stanford.edu
• Shutdown drytek2 SNF 2011-07-25 15:01:42: Repairing electrode   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2011-07-28 14:44:53: Update RF generator   eenriquez at snf.stanford.edu
• Problem drytek2 SNF 2011-06-27 13:45:36: bottom platen has no plasma   emyers at snf.stanford.edu
• Shutdown drytek2 SNF 2011-07-20 00:59:41: breaker   fc3 at snf.stanford.edu
• Problem drytek2 SNF 2011-07-18 15:33:36: descum: plasma flickers   fpurkl at snf.stanford.edu
• Problem drytek2 SNF 2011-07-15 12:09:57: O2 Plasma program can't get more than...   latta at snf.stanford.edu
• Problem drytek2 SNF 2011-07-11 15:45:18: bottom platen has no plasma again   lindaw at snf.stanford.edu
• Problem drytek2 SNF 2011-07-15 11:06:54: bottom platen has no plasma again   lindaw at snf.stanford.edu
• Comment drytek2 SNF 2011-07-19 12:35:00: Previous user could not get SF6 flow because   lindaw at snf.stanford.edu
• Problem drytek2 SNF 2011-07-21 13:02:53: bottom platen has no plama again   lindaw at snf.stanford.edu
• Comment drytek2 SNF 2011-07-21 13:07:44: process 1 O2 descum tuning very unstable   lindaw at snf.stanford.edu
• Problem drytek2 SNF 2011-07-21 13:28:38: etch rate very nonuniform across wafers and   lindaw at snf.stanford.edu
• Shutdown drytek2 SNF 2011-07-20 00:59:41: breaker   mdickey at snf.stanford.edu
• Shutdown drytek2 SNF 2011-07-21 10:27:31: no plasma   xzhuan1 at snf.stanford.edu
• Problem drytek2 SNF 2011-07-19 10:15:03: seem like it's out of order   ysohn at snf.stanford.edu

Last message date: Thu Jul 28 14:44:53 PDT 2011
Archived on: Fri Jan 11 13:05:15 PST 2013

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