From fungus at snf.stanford.edu Thu Jun 2 11:48:03 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Thu, 2 Jun 2011 11:48:03 -0700 Subject: Problem drytek2 SNF 2011-06-02 11:48:02: RF unstable Message-ID: RF starts out matched then after several minutes goes completely out of tune, the fwd power flux between 500w and 100w with rev steady at 50w. Something wrong with the RF. From eenriquez at snf.stanford.edu Mon Jun 6 10:21:59 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Jun 2011 10:21:59 -0700 Subject: Problem drytek2 SNF 2011-06-02 11:48:02: RF unstable Message-ID: No problem found. Ran O2 plasma for 15 minutes. Rf reflected power drifted from 0 to 12 watts about 4 minutes into the process. Retuned the matching network. Reflected power remained at 2 watss for the remainder of the process. From hector at snf.stanford.edu Thu Jun 9 19:43:13 2011 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Thu, 9 Jun 2011 19:43:13 -0700 Subject: Problem drytek2 SNF 2011-06-09 19:43:12: bottom electrode is dead Message-ID: power was unstable and fluctating quite a bit; sometimes plasma went out completely I then noticed that the bottom electrode went out... From eenriquez at snf.stanford.edu Fri Jun 10 09:48:42 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Jun 2011 09:48:42 -0700 Subject: Problem drytek2 SNF 2011-06-09 19:43:12: bottom electrode is dead Message-ID: Ran an O2 plasma @ 150 mt for 10 minutes with no problems. From dongrip at snf.stanford.edu Sat Jun 11 10:52:15 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sat, 11 Jun 2011 10:52:15 -0700 Subject: Problem drytek2 SNF 2011-06-11 10:52:14: the bottom electrode doesn't work Message-ID: From cbaxter at snf.stanford.edu Sun Jun 12 21:56:34 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 12 Jun 2011 21:56:34 -0700 Subject: Problem drytek2 SNF 2011-06-11 10:52:14: the bottom electrode doesn't work Message-ID: I did see any problem, I ran 10 mins o2 plasma w/out problem. From eenriquez at snf.stanford.edu Mon Jun 20 08:04:39 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Jun 2011 08:04:39 -0700 Subject: Comment drytek2 SNF 2011-05-27 09:18:34: found system vented in prgrm 3 not enabled Message-ID: Archived From srikantv at snf.stanford.edu Fri Jun 24 17:33:15 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Fri, 24 Jun 2011 17:33:15 -0700 Subject: Problem drytek2 SNF 2011-06-24 17:33:14: unable to reach 500W for Process#1 Message-ID: descum not working From lindaw at snf.stanford.edu Mon Jun 27 13:17:01 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 27 Jun 2011 13:17:01 -0700 Subject: Problem drytek2 SNF 2011-06-27 13:17:01: while running process 2 poly Message-ID: while running process2 poly etch, I set the forward power to 400 and reflected to 10. I then turned up the power to 415, and the reflected power remained at 10, but the RFLimit LED lit up on the front of the display. I also ran the process 1 O2 descum, and the forward power tops out around 425W, the reflected stay at about 20, but when you try to increase the forward power, the reflected power stays at around 20, but the RFLImit LED comes on. Usually the RFLimit LED only comes on when the reflected power goes above 50 or so when running at 500W. maybe the display meter is not showing the correct forward and reflected powers? From lindaw at snf.stanford.edu Mon Jun 27 13:45:36 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 27 Jun 2011 13:45:36 -0700 Subject: Problem drytek2 SNF 2011-06-27 13:45:36: bottom platen has no plasma Message-ID: From eenriquez at snf.stanford.edu Thu Jun 30 10:38:10 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Jun 2011 10:38:10 -0700 Subject: Comment drytek2 SNF 2011-06-30 10:38:09: Update RF power Message-ID: Connected the RF generator to a dummy load. Maximum output was only 428 Watts. The max output of the generator should be around 700 watts. The power output was also unstable. We set the power to 400 W and ran for 20 minutes. The power output steadily dropped to around 395W. We will try to replace the generator tomorrow.