Problem drytek2 SNF 2011-06-02 11:48:02: RF unstable

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jun 6 10:21:59 PDT 2011


No problem found.  Ran O2 plasma for 15 minutes.  Rf reflected power drifted from 0 to 12 watts about 4 minutes into the process.  Retuned the matching network.  Reflected power remained at 2 watss for the remainder of the process.




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