From dton at snf.stanford.edu Wed May 4 16:49:28 2011 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Wed, 4 May 2011 16:49:28 -0700 Subject: Problem drytek2 SNF 2011-05-04 16:49:27: Can't seem to pump down. Message-ID: Something is leaking. The chamber can't seem to pump down low enough to run process. Dinh From eenriquez at snf.stanford.edu Thu May 5 15:00:57 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 May 2011 15:00:57 -0700 Subject: Problem drytek2 SNF 2011-05-04 16:49:27: Can't seem to pump down. Message-ID: Changed the vacuum pump oil From lindaw at snf.stanford.edu Fri May 6 11:12:16 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 6 May 2011 11:12:16 -0700 Subject: Problem drytek2 SNF 2011-05-06 11:12:16: ceramics missing from right front of platens Message-ID: The ceramic blocks usually found on the right front of the platens are missing, except for the bottom platen, which has half of a spacer. What the ....? System taking a really long time to pump down. From lindaw at snf.stanford.edu Fri May 6 11:18:50 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 6 May 2011 11:18:50 -0700 Subject: Problem drytek2 SNF 2011-05-06 11:18:49: system cannot reach base pressure Message-ID: After 25 min of pumping, system has still not reached base pressure. From lindaw at snf.stanford.edu Fri May 6 11:24:46 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 6 May 2011 11:24:46 -0700 Subject: Problem drytek2 SNF 2011-05-06 11:24:46: Message-ID: From lindaw at snf.stanford.edu Fri May 6 11:28:05 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 6 May 2011 11:28:05 -0700 Subject: Shutdown drytek2 SNF 2011-05-06 11:28:05: can't reach base pressure again! Message-ID: can't reach base pressure yet again. From eenriquez at snf.stanford.edu Fri May 6 14:56:15 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 May 2011 14:56:15 -0700 Subject: Comment drytek2 SNF 2011-05-06 14:56:15: Update pumpdown problem Message-ID: Leak checked the system but found no leaks. Need to troubleshoot further. From cbaxter at snf.stanford.edu Sat May 7 06:55:31 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 May 2011 06:55:31 -0700 Subject: Problem drytek2 SNF 2011-05-06 11:24:46: Message-ID: From cbaxter at snf.stanford.edu Sat May 7 06:55:41 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 May 2011 06:55:41 -0700 Subject: Problem drytek2 SNF 2011-05-06 11:18:49: system cannot reach base pressure Message-ID: From cbaxter at snf.stanford.edu Sat May 7 06:55:47 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 May 2011 06:55:47 -0700 Subject: Problem drytek2 SNF 2011-05-06 11:12:16: ceramics missing from right front of platens Message-ID: From cbaxter at snf.stanford.edu Sat May 7 06:59:13 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 May 2011 06:59:13 -0700 Subject: Shutdown drytek2 SNF 2011-05-06 11:28:05: can't reach base pressure again! Message-ID: Tighten the clamps on the foreline and set crossover pressure to 20mt, cycled run and monitor base pressure. Now chamber crossover with in 10 second. From narii at snf.stanford.edu Sat May 14 17:49:35 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 14 May 2011 17:49:35 -0700 Subject: Comment drytek2 SNF 2011-05-14 17:49:34: System is off? Message-ID: Looks like power is turned off. Don't know how to turn it on. From eenriquez at snf.stanford.edu Mon May 16 09:49:55 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 May 2011 09:49:55 -0700 Subject: Comment drytek2 SNF 2011-05-14 17:49:34: System is off? Message-ID: Restarted the system. Ran an O2 plasma with no problems. From cbaxter at snf.stanford.edu Sun May 22 04:51:25 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 May 2011 04:51:25 -0700 Subject: Comment drytek2 SNF 2011-05-06 14:56:15: Update pumpdown problem Message-ID: From lindaw at snf.stanford.edu Mon May 23 14:13:28 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 23 May 2011 14:13:28 -0700 Subject: Comment drytek2 SNF 2011-05-23 14:13:28: found system vented in prgm 1, main power off. Message-ID: Last user forgot to run the standby program. From lindaw at snf.stanford.edu Fri May 27 09:18:34 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 27 May 2011 09:18:34 -0700 Subject: Comment drytek2 SNF 2011-05-27 09:18:34: found system vented in prgrm 3 not enabled Message-ID: someone forgot to run standby program.