From cbaxter at snf.stanford.edu Tue Nov 1 15:27:30 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 1 Nov 2011 15:27:30 -0700 Subject: Problem drytek2 SNF 2011-10-20 08:56:02: Timer for Process 2 is defective Message-ID: Ran a test with timer set at 1 to 9 mins could not duplicate the same, system timed out when process is done.. From eenriquez at snf.stanford.edu Wed Nov 2 08:15:40 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Nov 2011 08:15:40 -0700 Subject: Comment drytek2 SNF 2011-11-02 08:15:40: New operating procedure Message-ID: Attention: Before you use drytek2 please read the new operating instructions located in the blue book. They contain a new, as of 9/8/2011, RF tuning procedure. The changes have been underlined to highlight them. You will notice that the old RF power supply is back. At this time it will not go any higher than 400W. Expect etch rates to have decreased. A new power supply is on order so drytek2 should be able to deliver 500 total watts. We will let you know when it has been installed. The new tuning procedure will remain in place. In addition, there is a new log form for you to fill out at the end of the etch. You will be asked for the coil and cap settings. They can be found by looking on the coil and cap tuning pots (the black knobs used to tune the RF). We want to collect this information so that users of the tool can refer back to the last settings used for a given recipe and plug them in to ease the RF tuning procedure. Lastly, we are requiring the labmembers turn the RF power level to zero after using the tool. This will limit wear and tear on the RF power supply. We also ask that users tune the RF at a much lower power (40W) before turning the RF to the full power desired. This procedure is covered in the new operating instructions. Team Etch From eenriquez at snf.stanford.edu Wed Nov 2 08:16:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Nov 2011 08:16:21 -0700 Subject: Problem drytek2 SNF 2011-09-08 14:44:22: New operating instructions Message-ID: Archived Changed status from Problem to Comment From xzhuan1 at snf.stanford.edu Sun Nov 20 14:05:09 2011 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sun, 20 Nov 2011 14:05:09 -0800 Subject: Problem drytek2 SNF 2011-11-20 14:05:08: missing one pin on third plate Message-ID: From lindaw at snf.stanford.edu Wed Nov 23 11:44:57 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 23 Nov 2011 11:44:57 -0800 Subject: Problem drytek2 SNF 2011-11-23 11:44:57: missing front pin on 2nd platen from the top Message-ID: In addition to the missing rear pin on the 3rd platen, the 2nd platen is missing a front pin. From junam at snf.stanford.edu Wed Nov 23 23:56:18 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Wed, 23 Nov 2011 23:56:18 -0800 Subject: Problem drytek2 SNF 2011-11-23 23:56:18: SF6 flow Message-ID: SF5 flow reads -5. could not be adjusted. From eenriquez at snf.stanford.edu Fri Nov 25 11:53:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Nov 2011 11:53:12 -0800 Subject: Problem drytek2 SNF 2011-11-23 23:56:18: SF6 flow Message-ID: No problem found. Ran an SF6 + O2 recipe for 10 minutes with no problems. Please make sure that the SF6 valve behind the system is ON. From eenriquez at snf.stanford.edu Fri Nov 25 11:58:11 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Nov 2011 11:58:11 -0800 Subject: Comment drytek2 SNF 2011-11-25 11:58:10: Update missing pins. Message-ID: We are unable to replace the missing pins because part of the pin is stuck in the electrode. In order to replace the pins, we will need to take the entire electrode assembly out. We will replace the pins after the shutdown. From bchui at snf.stanford.edu Mon Nov 28 15:39:58 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 28 Nov 2011 15:39:58 -0800 Subject: Problem drytek2 SNF 2011-11-28 15:39:57: SF6 etch doesn't work for Tray 5 from top Message-ID: Tray appears dark whereas all other trays have plasma. (Doesn't seem to be a problem w/ CF4 though). From bchui at snf.stanford.edu Mon Nov 28 15:56:43 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 28 Nov 2011 15:56:43 -0800 Subject: Problem drytek2 SNF 2011-11-28 15:56:43: Back pin is missing (Tray 3 from top) Message-ID: Makes it hard to retrieve a wafer after etching... it keeps getting pushed towards the back From cbaxter at snf.stanford.edu Mon Nov 28 17:10:48 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 28 Nov 2011 17:10:48 -0800 Subject: Problem drytek2 SNF 2011-11-28 15:56:43: Back pin is missing (Tray 3 from top) Message-ID: Installed new teflon pin.. From griffin at snf.stanford.edu Tue Nov 29 16:16:39 2011 From: griffin at snf.stanford.edu (griffin at snf.stanford.edu) Date: Tue, 29 Nov 2011 16:16:39 -0800 Subject: Comment drytek2 SNF 2011-11-29 16:16:38: white process light 3 is out Message-ID: From elibol at snf.stanford.edu Wed Nov 30 09:34:36 2011 From: elibol at snf.stanford.edu (elibol at snf.stanford.edu) Date: Wed, 30 Nov 2011 09:34:36 -0800 Subject: Problem drytek2 SNF 2011-11-30 09:34:35: Tuning did not work Message-ID: Was not able to tune/strike plasma From xzhuan1 at snf.stanford.edu Wed Nov 30 10:30:09 2011 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Wed, 30 Nov 2011 10:30:09 -0800 Subject: Problem drytek2 SNF 2011-11-30 10:30:09: no sf6 flow Message-ID: From eenriquez at snf.stanford.edu Wed Nov 30 10:37:49 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 30 Nov 2011 10:37:49 -0800 Subject: Problem drytek2 SNF 2011-11-30 10:30:09: no sf6 flow Message-ID: Switched gas controller to auto mode. From eenriquez at snf.stanford.edu Wed Nov 30 11:16:17 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 30 Nov 2011 11:16:17 -0800 Subject: Problem drytek2 SNF 2011-11-28 15:39:57: SF6 etch doesn't work for Tray 5 from top Message-ID: Unable to duplicate the problem.