Problem drytek2 SNF 2011-11-23 23:56:18: SF6 flow

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Nov 25 11:53:12 PST 2011


No problem found.  Ran an SF6 + O2 recipe for 10 minutes with no problems.  Please make sure that the SF6 valve behind the system is ON.




More information about the drytek2-pcs mailing list